Solar propulsion assist
    1.
    发明授权
    Solar propulsion assist 失效
    太阳能推进协助

    公开(公告)号:US06698693B2

    公开(公告)日:2004-03-02

    申请号:US10124538

    申请日:2002-04-16

    Abstract: This invention relates generally to method and apparatus for solar-boost assist and solar-sail assist by a mini-optics light concentrator system utilizing a dynamic ensemble of mini-mirrors. In the boost phase of a rocket ship launch, the system focusses solar energy into the rocket chamber to raise the temperature of the propellant and increase the impulse. In the mid-course phase, the system focusses solar energy onto the rocket's solar sail to increase the thrust. In both cases, the system reduces the weight of the rocket by providing a weightless source of thrust.

    Abstract translation: 本发明一般涉及利用微型反射镜的动态组合的微型光学聚光器系统的太阳能升压辅助和太阳帆辅助的方法和装置。 在火箭发射的提升阶段,该系统将太阳能集中在火箭炮室中,以提高推进剂的温度并增加冲击。 在中期阶段,该系统将太阳能集中在火箭的太阳帆上,以增加推力。 在这两种情况下,该系统通过提供无重量的推力来降低火箭的重量。

    Mireau interference objective lens
    2.
    发明授权
    Mireau interference objective lens 失效
    Mireau干涉物镜

    公开(公告)号:US07054071B2

    公开(公告)日:2006-05-30

    申请号:US10886817

    申请日:2004-07-08

    Inventor: Mark P. Davidson

    CPC classification number: G02B21/02 G02B27/0068

    Abstract: A Mireau interference microscope is corrected for spherical and other aberrations induced by the beamsplitter and mirror support windows by incorporating a cover glass correcting-objective lens. The support windows for the beamsplitter and mirror have a combined thickness within the adjustment range of the cover glass correcting-objective lens.

    Abstract translation: 通过并入玻璃校正物镜,对分光镜和反射镜支撑窗所引起的球面和其它像差校正Mireau干涉显微镜。 用于分束器和反射镜的支撑窗口具有在玻璃校正物镜的调节范围内的组合厚度。

    Interferometric back focal plane scatterometry with Koehler illumination
    3.
    发明授权
    Interferometric back focal plane scatterometry with Koehler illumination 有权
    用Koehler照明进行干涉后焦平面散射测量

    公开(公告)号:US07061623B2

    公开(公告)日:2006-06-13

    申请号:US10647742

    申请日:2003-08-25

    Inventor: Mark P. Davidson

    CPC classification number: G03F7/70633 G01J3/453 G01N21/95684

    Abstract: An interference spectroscopy instrument provides simultaneous measurement of specular scattering over multiple wavelengths and angles. The spectroscopy instrument includes an interference microscope illuminated by Koehler illumination and a video camera located to image the back focal plane of the microscope's objective lens while the path-length difference is varied between the reference and object paths. Multichannel Fourier analysis transforms the resultant intensity information into specular reflectivity data as a function of wavelength. This multitude of measured data provides a more sensitive scatterometry tool having superior performance in the measurement of small patterns on semiconductor devices and in measuring overlay on such devices.

    Abstract translation: 干涉光谱仪可以同时测量多个波长和角度上的镜面散射。 光谱仪器包括由科勒照明器照明的干涉显微镜和摄像机,其用于对显微镜物镜的后焦面进行成像,同时路径长度差在参考路径和对象路径之间变化。 多通道傅里叶分析将合成的强度信息转换为镜面反射率数据作为波长的函数。 这种大量的测量数据提供了一种更敏感的散射测量工具,在测量半导体器件上的小图案以及测量这些器件上的覆盖层方面具有卓越的性能。

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