Invention Grant
- Patent Title: Calibration cassette pod for robot teaching and method of using
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Application No.: US10041849Application Date: 2002-01-07
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Publication No.: US07054713B2Publication Date: 2006-05-30
- Inventor: Kuo-Hsing Teng , Fu-Shun Lo , Yi-Chang Tsai
- Applicant: Kuo-Hsing Teng , Fu-Shun Lo , Yi-Chang Tsai
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Tung & Assoc.
- Main IPC: G01B11/00
- IPC: G01B11/00

Abstract:
A calibration cassette pod for robot teaching and a method of using the calibration cassette pod are described. In the calibration cassette pod, a cassette pod body and a cassette pod door are first provided wherein the cassette pod body is constructed of a top panel, a bottom panel, two side panels and a front panel to enclose a cavity therein. A first plurality of ribs is formed on an inside surface of the cassette pod body, each having a predetermined depth sufficient to support an edge portion of a wafer. An optical detector housing is mounted on an opening in the front panel and is adapted for receiving an optical detector therein. An optical detector that includes a light emission source and a photo diode receiver for determining the position of the edge portion of the wafer is mounted in the optical detector housing.
Public/Granted literature
- US20030129047A1 Calibration cassette pod for robot teaching and method of using Public/Granted day:2003-07-10
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