公开(公告)号：US20110117283A1

公开(公告)日：2011-05-19

申请号：US12618464

申请日：2009-11-13

申请人： Chia-Hao HSUEH ,  Yuan-Chun CHAO ,  Kuo-Hsing TENG ,  Chao-Chen CHEN

发明人： Chia-Hao HSUEH ,  Yuan-Chun CHAO ,  Kuo-Hsing TENG ,  Chao-Chen CHEN

IPC分类号： B05D1/02 ,  B05C9/08

CPC分类号： H01L21/6715

摘要： A spray coating system is provided. The spray coating system includes a spin support for supporting and spinning the substrate; a sprayer for applying a material to an upper surface of the substrate; a cup surrounding a lateral and lower region of the spin support, wherein an opening is located in an upper central region of the cup; an air supply mechanism for supplying air flows to a back surface of the substrate to prevent the material from adhering thereto, and an exhaust zone disposed below a slanted surface of the cup for exhausting the air flow and material.

摘要翻译： 提供喷涂系统。 喷涂系统包括用于支撑和旋转衬底的自旋支撑件; 用于将材料施加到所述基板的上表面的喷雾器; 围绕所述自旋支撑件的横向和下部区域的杯，其中开口位于所述杯的上中心区域中; 空气供给机构，用于向基板的后表面供给空气，以防止材料粘附到其上;排气区，设置在杯的倾斜表面下方排出气流和材料。

公开(公告)号：US20130032173A1

公开(公告)日：2013-02-07

申请号：US13196086

申请日：2011-08-02

申请人： Yen-Shao PENG ,  Chia-Hao Hsueh ,  Kuo-Hsing Teng

发明人： Yen-Shao PENG ,  Chia-Hao Hsueh ,  Kuo-Hsing Teng

IPC分类号： B08B9/027 ,  B08B3/04

CPC分类号： H01L21/67017 ,  B08B9/027 ,  H01L21/67051

摘要： A cleaning device is provided, including a top portion, a middle portion, and a bottom portion. The top portion includes a first opening. The middle portion is connected to the top portion, and includes an inlet on a lateral side, an annular channel communicated with the inlet, and a second opening communicated with the first opening. The bottom portion is connected to the middle portion, and includes a reservoir and a third opening. The third opening communicates the second opening and the reservoir.

摘要翻译： 提供一种清洁装置，包括顶部，中间部分和底部。 顶部包括第一开口。 中间部分连接到顶部，并且包括在侧面上的入口，与入口连通的环形通道，以及与第一开口连通的第二开口。 底部连接到中间部分，并且包括储存器和第三开口。 第三开口连通第二开口和储存器。

公开(公告)号：US07206663B2

公开(公告)日：2007-04-17

申请号：US11370540

申请日：2006-03-07

申请人： Kuo-Hsing Teng ,  Fu-Shun Lo ,  Yi-Chang Tsai

发明人： Kuo-Hsing Teng ,  Fu-Shun Lo ,  Yi-Chang Tsai

IPC分类号： G06F7/00

CPC分类号： H01L21/67265 ,  H01L21/681

摘要： A calibration cassette pod for robot teaching and a method of using the calibration cassette pod are described. In the calibration cassette pod, a cassette pod body and a cassette pod door are first provided wherein the cassette pod body is constructed of a top panel, a bottom panel, two side panels and a front panel to enclose a cavity therein. A first plurality of ribs is formed on an inside surface of the cassette pod body, each having a predetermined depth sufficient to support an edge portion of a wafer. An optical detector housing is mounted on an opening in the front panel and is adapted for receiving an optical detector therein. An optical detector that includes a light emission source and a photo diode receiver for determining the position of the edge portion of the wafer is mounted in the optical detector housing.

摘要翻译： 描述了用于机器人教导的校准盒式盒和使用校准盒式盒的方法。 在校准盒式盒中，首先提供盒式盒本体和盒式荚式门，其中盒式荚体由顶板，底板，两个侧板和前面板构成，以在其中封闭空腔。 第一多个肋形成在盒盒体的内表面上，每个肋具有足以支撑晶片的边缘部分的预定深度。 光学检测器壳体安装在前面板中的开口上并且适于在其中接收光学检测器。 包括发光源和用于确定晶片的边缘部分的位置的光电二极管接收器的光学检测器安装在光学检测器壳体中。

公开(公告)号：US20050051087A1

公开(公告)日：2005-03-10

申请号：US10658709

申请日：2003-09-08

申请人： Kuo-Hsing Teng ,  Chia-Ray Tzou ,  Richard Peng ,  Jian-Hong Chen

发明人： Kuo-Hsing Teng ,  Chia-Ray Tzou ,  Richard Peng ,  Jian-Hong Chen

IPC分类号： C23C16/00 ,  H01L21/00

CPC分类号： H01L21/6708

摘要： A primer tank having a nozzle assembly which uniformly distributes nitrogen or other vapor-generating gas against a primer liquid in the tank to generate a primer vapor for the priming of a semiconductor wafer substrate. The nozzle assembly includes a conduit to which is confluently attached a nozzle head having a nozzle plate. Multiple openings are provided in the nozzle plate to substantially uniformly distribute nitrogen or other inert gas against the surface of the primer liquid over a large area to generate a primer mist from the primer liquid and substantially reduce the formation of primer droplets in the tank.

摘要翻译： 一种底漆罐，其具有喷嘴组件，其将氮气或其他产生气体的气体均匀地分配在罐中的底漆液体上，以产生用于半导体晶片衬底的底漆的底漆蒸气。 喷嘴组件包括导管，其汇合地附接有具有喷嘴板的喷嘴头。 在喷嘴板中设置多个开口，以在大面积上大致均匀地将氮气或其它惰性气体均匀地分布在底漆液体的表面上，以从底漆液体产生底漆，并大大减少油箱中底漆液滴的形成。

公开(公告)号：US20100045959A1

公开(公告)日：2010-02-25

申请号：US12195870

申请日：2008-08-21

申请人： Shin-Hsiang Chou ,  Kuo-Hsing Teng ,  Yang-Kuao Kuo

发明人： Shin-Hsiang Chou ,  Kuo-Hsing Teng ,  Yang-Kuao Kuo

IPC分类号： G03B27/58 ,  H04N7/18

CPC分类号： G03F9/7034 ,  G03F9/7088

摘要： A method for leveling a wafer in a photolithography apparatus is disclosed, including inputting a wafer into the photolithography apparatus to be supported by a chuck, using at least three image capture devices to capture images of corresponding alignment marks on the wafer; and leveling the wafer according to the clarity of the images of the corresponding alignment marks on the wafer captured by the image capture device.

摘要翻译： 公开了一种用于在光刻设备中调平晶片的方法，包括使用至少三个图像捕获设备将晶片输入到光刻设备中以由卡盘支撑，以捕获晶片上相应对准标记的图像; 以及根据由图像捕获装置捕获的晶片上对应的对准标记的图像的清晰度来平整晶片。

公开(公告)号：US07601955B2

公开(公告)日：2009-10-13

申请号：US11896622

申请日：2007-09-04

申请人： Yang-Kuao Kuo ,  Kuo-Hsing Teng

发明人： Yang-Kuao Kuo ,  Kuo-Hsing Teng

IPC分类号： G01N7/00

CPC分类号： H01J37/28 ,  H01J37/09 ,  H01J2237/045

摘要： A scanning electron microscope is provided. The scanning electron microscope includes an electron beam source generating a primary electron beam, a condenser lens converging the primary electron beam, a base plate with a diamond film formed on the surface thereof having an aperture for passing of the primary electron beam, and a scanning unit two-dimensionally scanning a specimen with the primary electron beam.

摘要翻译： 提供扫描电子显微镜。 扫描电子显微镜包括产生一次电子束的电子束源，会聚一次电子束的聚光透镜，在其表面上形成有金刚石膜的基板，其具有用于使一次电子束通过的孔，扫描电子显微镜 单元用一次电子束二维扫描样品。

公开(公告)号：US20090057555A1

公开(公告)日：2009-03-05

申请号：US11896622

申请日：2007-09-04

申请人： Yang-Kuao Kuo ,  Kuo-Hsing Teng

发明人： Yang-Kuao Kuo ,  Kuo-Hsing Teng

IPC分类号： H01J37/28

CPC分类号： H01J37/28 ,  H01J37/09 ,  H01J2237/045

摘要： A scanning electron microscope is provided. The scanning electron microscope includes an electron beam source generating a primary electron beam, a condenser lens converging the primary electron beam, a base plate with a diamond film formed on the surface thereof having an aperture for passing of the primary electron beam, and a scanning unit two-dimensionally scanning a specimen with the primary electron beam.

公开(公告)号：US20060184270A1

公开(公告)日：2006-08-17

申请号：US11370540

申请日：2006-03-07

申请人： Kuo-Hsing Teng ,  Fu-Shun Lo ,  Yi-Chang Tsai

发明人： Kuo-Hsing Teng ,  Fu-Shun Lo ,  Yi-Chang Tsai

IPC分类号： G01B11/00

CPC分类号： H01L21/67265 ,  H01L21/681

摘要： A calibration cassette pod for robot teaching and a method of using the calibration cassette pod are described. In the calibration cassette pod, a cassette pod body and a cassette pod door are first provided wherein the cassette pod body is constructed of a top panel, a bottom panel, two side panels and a front panel to enclose a cavity therein. A first plurality of ribs is formed on an inside surface of the cassette pod body, each having a predetermined depth sufficient to support an edge portion of a wafer. An optical detector housing is mounted on an opening in the front panel and is adapted for receiving an optical detector therein. An optical detector that includes a light emission source and a photo diode receiver for determining the position of the edge portion of the wafer is mounted in the optical detector housing.

公开(公告)号：US07054713B2

公开(公告)日：2006-05-30

申请号：US10041849

申请日：2002-01-07

申请人： Kuo-Hsing Teng ,  Fu-Shun Lo ,  Yi-Chang Tsai

发明人： Kuo-Hsing Teng ,  Fu-Shun Lo ,  Yi-Chang Tsai

IPC分类号： G01B11/00

CPC分类号： H01L21/67265 ,  H01L21/681

摘要： A calibration cassette pod for robot teaching and a method of using the calibration cassette pod are described. In the calibration cassette pod, a cassette pod body and a cassette pod door are first provided wherein the cassette pod body is constructed of a top panel, a bottom panel, two side panels and a front panel to enclose a cavity therein. A first plurality of ribs is formed on an inside surface of the cassette pod body, each having a predetermined depth sufficient to support an edge portion of a wafer. An optical detector housing is mounted on an opening in the front panel and is adapted for receiving an optical detector therein. An optical detector that includes a light emission source and a photo diode receiver for determining the position of the edge portion of the wafer is mounted in the optical detector housing.

公开(公告)号：US06926489B2

公开(公告)日：2005-08-09

申请号：US10143084

申请日：2002-05-09

申请人： Yan-Ping Lee ,  Kuo-Hsing Teng ,  Chi-Chung Chang ,  Fu-Shun Lo

发明人： Yan-Ping Lee ,  Kuo-Hsing Teng ,  Chi-Chung Chang ,  Fu-Shun Lo

IPC分类号： H01L21/673 ,  H01L21/677 ,  B65G1/133

CPC分类号： H01L21/68707 ,  H01L21/67373 ,  H01L21/67781 ,  Y10S414/135 ,  Y10S414/14

摘要： A latch sensor for a pod transport gripper for transferring semiconductor wafers is disclosed. The transport gripper has a left bar and a right bar, as well as a cross bar connecting the left and the right bars. The gripper also has a left clamp and a right clamp disposed on interior sides of the left bar and the right bar, respectively, to clamp a pod, such as a front-opening unified pod (FOUP), for transport. A number of latches are disposed on the cross bar, and correspond to a number of latch holes of the pod. The gripper has at least one latch sensor disposed on either the left bar, the right bar, or both, to determine whether the latches have properly engaged the latch holes of the pod.

摘要翻译： 公开了一种用于传送半导体晶片的荚运输夹具的闩锁传感器。 运输夹具具有左栏和右栏，以及连接左右杆的横杆。 夹具还分别设置在左栏和右栏的内侧上的左夹具和右夹具，以夹紧诸如前开口的统一吊舱（FOUP）的荚，用于运输。 多个闩锁设置在横杆上，并且对应于荚的多个闩锁孔。 夹具具有设置在左栏，右栏或两者上的至少一个闩锁传感器，以确定闩锁是否已正确地接合吊舱的闩锁孔。