- 专利标题: Fabrication method for organic semiconductor transistor having organic polymeric gate insulating layer
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申请号: US11197090申请日: 2005-08-04
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公开(公告)号: US07056838B2公开(公告)日: 2006-06-06
- 发明人: Jae Hoon Shim , Sung Min Kim , Bong Ok Kim , No Gil Park , Mi Young Kwak , Young Kwan Kim
- 申请人: Jae Hoon Shim , Sung Min Kim , Bong Ok Kim , No Gil Park , Mi Young Kwak , Young Kwan Kim
- 代理机构: Cantor Colburn LLP
- 主分类号: H01L21/31
- IPC分类号: H01L21/31
摘要:
Provided is a method for fabricating an organic semiconductor transistor having an organic polymeric gate insulating layer. The method includes forming an organic gate insulating layer on a substrate by a vapor deposition method using organic monomer sources, and causing a polymerization reaction to occur in the organic gate insulating layer to complete an organic polymeric gate insulating layer. Since the vapor deposition method, which is a low-temperature dry-type technique, is employed, the organic polymeric gate insulating layer can be uniformly formed on a large-area substrate by a simplified in-situ process.
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