发明授权
- 专利标题: Dielectric materials
- 专利标题(中): 介电材料
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申请号: US10624021申请日: 2003-07-21
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公开(公告)号: US07057244B2公开(公告)日: 2006-06-06
- 发明人: Wanda Andreoni , Alessandro Curioni , Stephen A. Shevlin
- 申请人: Wanda Andreoni , Alessandro Curioni , Stephen A. Shevlin
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Robert M. Trepp
- 优先权: EP02016100 20020719
- 主分类号: H01L29/76
- IPC分类号: H01L29/76
摘要:
An article of manufacture comprises a substrate and a layer of N(x)Y(1−x)AlO3 on the substrate where x is a molar fraction greater than zero and less than one, and N is an element selected from La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu. The article may be an electronic device further comprising an electrode electrically isolated from the substrate by the layer. In particular, the dielectric properties of the layer are such that the layer is especially although by no means exclusively useful for electrically isolating gate electrodes in field effect transistor devices. The layer may be formed on the substrate via molecular beam epitaxy.
公开/授权文献
- US20040077177A1 Dielectric materials 公开/授权日:2004-04-22