Invention Grant
- Patent Title: Common optical-path testing of high-numerical-aperture wavefronts
- Patent Title (中): 高数值孔径波前的普通光路测试
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Application No.: US10652903Application Date: 2003-08-29
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Publication No.: US07057737B2Publication Date: 2006-06-06
- Inventor: James E. Millerd , Neal J. Brock , John B. Hayes , James C. Wyant
- Applicant: James E. Millerd , Neal J. Brock , John B. Hayes , James C. Wyant
- Applicant Address: US AZ Tucson
- Assignee: 4D Technology Corporation
- Current Assignee: 4D Technology Corporation
- Current Assignee Address: US AZ Tucson
- Agent Antonio R. Durando
- Main IPC: G01B9/02
- IPC: G01B9/02
Abstract:
A polarizing point-diffraction plate is used to produce common-path test and reference wavefronts with mutually orthogonal polarizations from an input wavefront. The common-path test and reference wavefronts are collimated, phase shifted and interfered, and the resulting interferograms are imaged on a detector. The interference patterns are then processed using conventional algorithms to characterize the input light wavefront.
Public/Granted literature
- US20050046863A1 Common optical-path testing of high-numerical-aperture wavefronts Public/Granted day:2005-03-03
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