发明授权
- 专利标题： Method of manufacturing an optical element using a hologram
- 专利标题（中）： 使用全息图制造光学元件的方法
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申请号： US10845251申请日： 2004-05-14
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公开(公告)号： US07061626B1公开(公告)日： 2006-06-13
- 发明人: Frank Schillke , Susanne Beder , Jochen Hetzler
- 申请人： Frank Schillke , Susanne Beder , Jochen Hetzler
- 申请人地址： DE Oberkochen
- 专利权人： Carl Zeiss SMT AG
- 当前专利权人： Carl Zeiss SMT AG
- 当前专利权人地址： DE Oberkochen
- 代理机构： Jones Day
- 主分类号： G01B9/02
- IPC分类号： G01B9/02
摘要：
A method of manufacturing an optical element having an optical surface of a target shape includes performing an interferometric test using an interferometer optics, wherein the interferometer optics includes a hologram that deflects a beam of measuring light by a substantial angle or that displaces an axis of symmetry of measuring light emerging from the hologram with respect to an axis of symmetry of measuring light incident on the hologram.