Invention Grant
- Patent Title: Mask ROM and fabrication thereof
- Patent Title (中): 掩模ROM及其制造
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Application No.: US10888104Application Date: 2004-07-09
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Publication No.: US07064035B2Publication Date: 2006-06-20
- Inventor: Ching-Yu Chang
- Applicant: Ching-Yu Chang
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX International Co., Ltd.
- Current Assignee: MACRONIX International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Main IPC: H01L21/8236
- IPC: H01L21/8236

Abstract:
A Mask ROM and a method for fabricating the same are described. The Mask ROM comprises a substrate, a plurality of gates on the substrate, a gate oxide layer between the gates and the substrate, a plurality of buried bit lines in the substrate between the gates, an insulator on the buried bit lines and between the gates, a plurality of word lines each disposed over a row of gates perpendicular to the buried bit lines, and a coding layer between the word lines and the gates.
Public/Granted literature
- US20040256682A1 Mask ROM and fabrication thereof Public/Granted day:2004-12-23
Information query
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