Invention Grant
US07064094B2 Highly durable silica glass, process and apparatus for producing same, and member and apparatus provided with same
有权
高耐用的二氧化硅玻璃，其制造方法和装置以及具有该玻璃的构件和装置
- Patent Title: Highly durable silica glass, process and apparatus for producing same, and member and apparatus provided with same
- Patent Title (中): 高耐用的二氧化硅玻璃，其制造方法和装置以及具有该玻璃的构件和装置
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Application No.: US10718575Application Date: 2003-11-24
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Publication No.: US07064094B2Publication Date: 2006-06-20
- Inventor: Yoshinori Harada , Shuzo Mizutani , Shinkichi Hashimoto , Masakazu Kudoh , Naoki Miura , Katsufumi Takahashi , Hideki Kiyohara
- Applicant: Yoshinori Harada , Shuzo Mizutani , Shinkichi Hashimoto , Masakazu Kudoh , Naoki Miura , Katsufumi Takahashi , Hideki Kiyohara
- Applicant Address: JP Yamaguchi JP Yamaguchi JP Yamaguchi
- Assignee: Tosoh Corporation,Tosoh Quartz Corporation,Tosoh SMG Corporation
- Current Assignee: Tosoh Corporation,Tosoh Quartz Corporation,Tosoh SMG Corporation
- Current Assignee Address: JP Yamaguchi JP Yamaguchi JP Yamaguchi
- Agency: Sughrue Mion, PLLC
- Priority: JP2001-87082 20010326; JP2001-166307 20010601; JP2001-166311 20010601
- Main IPC: C03C3/06
- IPC: C03C3/06
Abstract:
Highly durable silica glass containing 0.01% to 2% by weight of at least one element selected from magnesium, calcium, strontium, barium, yttrium, hafnium and zirconium. The silica glass is produced by melting a powdery material comprising a finely divided silica powder and a finely divided zirconium-containing substance by oxyhydrogen flame or plasma are to form an accumulated molten material layer, and extending the molten material layer outwardly in radial directions.
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