Invention Grant
- Patent Title: Scanning probe microscope
- Patent Title (中): 扫描探针显微镜
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Application No.: US11136970Application Date: 2005-05-25
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Publication No.: US07066015B2Publication Date: 2006-06-27
- Inventor: Akihiko Honma
- Applicant: Akihiko Honma
- Applicant Address: JP Chiba
- Assignee: SII NanoTechnology Inc.
- Current Assignee: SII NanoTechnology Inc.
- Current Assignee Address: JP Chiba
- Agency: Adams & Wilks
- Priority: JP2002-141899 20020516
- Main IPC: G01N13/16
- IPC: G01N13/16

Abstract:
There is provided a scanning probe microscope capable of simply and accurately confirming whether or not a sample shape satisfies specified conditions. A pseudo reference image Sref1 comprises a pair of reference line profiles Lref1 and Lref2 arranged apart form each other in parallel. An operator moves and rotates the position of the pseudo reference image Sref1 on a screen so that a sample shape line profile fits between the reference line profiles Lref1 and Lref2 of the pseudo reference image Sref1. If it is possible to fit the line profile of the sample shape between the reference line profiles Lref1 and Lref2, it is determined that the sample shape is in spec, while if it is not possible to fit the line profile of the sample shape between the reference line profiles Lref1 and Lref2, no matter how the pseudo reference image Sref1 is moved and rotated, it is determined that the sample shape is out of spec.
Public/Granted literature
- US20050217354A1 Scanning probe microscope Public/Granted day:2005-10-06
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