公开(公告)号：US08608373B2

公开(公告)日：2013-12-17

申请号：US12806364

申请日：2010-08-11

申请人： Kazunori Ando ,  Masayuki Iwasa ,  Masatsugu Shigeno ,  Hiroumi Momota ,  Kazutoshi Watanabe

发明人： Kazunori Ando ,  Masayuki Iwasa ,  Masatsugu Shigeno ,  Hiroumi Momota ,  Kazutoshi Watanabe

IPC分类号： G01N25/02 ,  G01N25/18

CPC分类号： G01N25/18 ,  G01N25/04 ,  G01Q60/58

摘要： In a local softening point measuring apparatus and thermal conductivity measuring apparatus using a probe microscope as a base, environment of the prob˜ and a sample surface is set to 1/100 atmospheric pressure (103 Pa) or lower. Otherwise, a side surface of the probe is coated with a thermal insulation material having a thickness that enables thermal dissipation to be reduced to 1/100 or lower, to thereby reduce the thermal dissipation from the side surface of the probe, and exchange heat substantially only at the contacting portion between the probe and the sample surface.

摘要翻译： 在使用探针显微镜作为基础的局部软化点测定装置和热导率测定装置中，将试样表面的环境设定为1/100大气压（103Pa）以下。 否则，探针的侧表面涂覆有能够使散热减小到1/100或更低的厚度的绝热材料，从而减少从探针侧表面的散热，并且基本上交换热量 仅在探针和样品表面之间的接触部分处。

公开(公告)号：US20130180019A1

公开(公告)日：2013-07-11

申请号：US13737022

申请日：2013-01-09

申请人： SII NANOTECHNOLOGY INC.

发明人： Masafumi WATANABE ,  Hiroumi MOMOTA

IPC分类号： G01Q70/10

CPC分类号： G01Q70/10 ,  G01Q40/00

摘要： Provided is a method of evaluating a probe tip shape in a scanning probe microscope, including: measuring the probe tip shape by a probe shape test sample having a needle-like structure; determining radii of cross-sections at a plurality of distances from the apex; and calculating, based on the distances and the radii, a radios of curvature when the probe tip shape is approximated by a circle.

摘要翻译： 提供了一种在扫描探针显微镜中评价探针尖端形状的方法，包括：通过具有针状结构的探针形状测试样品测量探针尖端形状; 确定距所述顶点多个距离处的横截面的半径; 并且当探针尖端形状由圆形近似时，基于距离和半径计算曲率半径。

公开(公告)号：US08269194B2

公开(公告)日：2012-09-18

申请号：US12733089

申请日：2008-08-06

申请人： Takashi Kaito ,  Junichi Tashiro ,  Yasuhiko Sugiyama ,  Kouji Iwasaki ,  Toshiaki Fujii ,  Kazuo Aita ,  Takashi Ogawa

发明人： Takashi Kaito ,  Junichi Tashiro ,  Yasuhiko Sugiyama ,  Kouji Iwasaki ,  Toshiaki Fujii ,  Kazuo Aita ,  Takashi Ogawa

IPC分类号： H01J49/00

CPC分类号： H01J37/3056 ,  G01N1/286 ,  G01N1/32 ,  G03F1/74 ,  G03F1/84 ,  H01J37/08 ,  H01J37/3005 ,  H01J2237/0805 ,  H01J2237/0807 ,  H01J2237/31745

摘要： A composite focused ion beam device has a sample stage for supporting a sample, a first ion beam irradiation system that irradiates a first ion beam for processing the sample, and a second ion beam irradiation system that irradiates a second ion beam for processing or observing the sample. The first ion beam irradiation system has a liquid metal ion source that generates first ions for forming the first ion beam. The second ion beam irradiation system has a gas field ion source that generates second ions for forming the second ion beam. The first ion beam irradiated by the first ion beam irradiation system has a first beam diameter and the second ion beam irradiated by the second ion beam irradiation system has a second beam diameter smaller than the first beam diameter. The first and second ion beam irradiation systems are disposed relative to the sample stage so that axes of the first and second ion beams are orthogonal to a tilt axis of the sample stage.

摘要翻译： 复合聚焦离子束装置具有用于支撑样品的样品台，照射用于处理样品的第一离子束的第一离子束照射系统和照射第二离子束以用于处理或观察样品的第二离子束照射系统 样品。 第一离子束照射系统具有产生用于形成第一离子束的第一离子的液态金属离子源。 第二离子束照射系统具有产生用于形成第二离子束的第二离子的气体场离子源。 由第一离子束照射系统照射的第一离子束具有第一光束直径，并且由第二离子束照射系统照射的第二离子束具有小于第一光束直径的第二光束直径。 第一和第二离子束照射系统相对于样品台设置，使得第一和第二离子束的轴线垂直于样品台的倾斜轴。

公开(公告)号：US08198603B2

公开(公告)日：2012-06-12

申请号：US12290397

申请日：2008-10-29

申请人： Haruo Takahashi ,  Ikuko Nakatani ,  Junichi Tashiro

发明人： Haruo Takahashi ,  Ikuko Nakatani ,  Junichi Tashiro

IPC分类号： H01J37/20 ,  G21K5/10 ,  G01N1/28

CPC分类号： H01J37/20 ,  H01J37/023 ,  H01J37/3056 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/2062 ,  H01J2237/208 ,  H01J2237/31745 ,  H01J2237/31749

摘要： A sample preparing device has a sample stage that supports a sample and undergoes rotation about a first rotation axis to bring a preselected direction of the sample piece into coincidence with an intersection line between a first plane formed by a surface of the sample piece and a second plane. A manipulator holds sample piece of the sample and undergoes rotation about a second rotation axis independently of the sample stage to rotate the sample piece to a preselected position in the state in which the preselected direction of the sample piece coincides with the intersection line. The manipulator is disposed relative to the sample stage so that an angle between the second rotation axis and the surface of the sample is in the range of 0° to 45°. The second plane corresponds to a plane obtained by rotating around the second rotation axis a line segment which is vertical to the surface of the sample and of which one end corresponds to an intersection between the surface of the sample and the second rotation axis.

摘要翻译： 样品制备装置具有样品台，其支撑样品并围绕第一旋转轴线旋转以使样品片的预选方向与由样品片的表面形成的第一平面和第二面之间的交线相符， 飞机 操纵器保持样品的样品并且独立于样品台绕第二旋转轴旋转，以在样品的预选方向与交叉线重合的状态下将样品片旋转到预选位置。 操纵器相对于样品台设置，使得第二旋转轴与样品表面之间的角度在0°至45°的范围内。 第二平面对应于通过围绕第二旋转轴旋转垂直于样品表面的线段并且其一端对应于样品表面和第二旋转轴线之间的交叉而获得的平面。

公开(公告)号：US08191168B2

公开(公告)日：2012-05-29

申请号：US12264750

申请日：2008-11-04

申请人： Xin Man ,  Kouji Iwasaki ,  Tatsuya Asahata

发明人： Xin Man ,  Kouji Iwasaki ,  Tatsuya Asahata

IPC分类号： G01N13/10

CPC分类号： H01J37/3056 ,  B82Y15/00 ,  G01N1/286 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/2067 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

摘要： Provided is a method of preparing a sample piece for a transmission electron microscope, the sample piece for a transmission electron microscope including a substantially planar finished surface which can be observed with the transmission electron microscope and a grabbing portion which microtweezers can grab without contacting the finished surface. The method of preparing a sample piece for a transmission electron microscope is characterized by including: a first step of cutting out the sample piece from a sample body Wa with a charged particle beam, the sample piece being coupled to the sample body at a coupling portion; a second step of grabbing with the microtweezers the grabbing portion of the sample piece with the finished surface of the sample piece cut out in the first step being covered with the microtweezers; a third step of detaching the sample piece grabbed with the microtweezers in the second step from the sample body by cutting the coupling portion with the charged particle beam with a grabbed state of the sample piece being maintained; and a fourth step of transferring and fixing with the microtweezers the sample piece detached in the third step onto a sample holder.

摘要翻译： 提供了一种制备透射电子显微镜样品的方法，用于透射电子显微镜的样品片，其包括可透射电子显微镜观察的基本上平面的成品表面，以及微型加工者可以在不接触成品的情况下抓取的抓取部分 表面。 制备透射电子显微镜样品的方法的特征在于包括：第一步骤，利用带电粒子束从样品体Wa切出样品片，样品片以耦合部分 ; 第二步骤是用微型加湿器抓住样品的抓取部分，其中在第一步骤中切出的样品的成品表面被微型加工机覆盖; 第三步骤，通过用保持样品的抓取状态的带电粒子束切割耦合部分，将样品从第二步骤中剥离出来; 以及第四步骤，用微型加工机将第三步骤中拆卸的样品片转移和固定到样品架上。

公开(公告)号：US08161568B2

公开(公告)日：2012-04-17

申请号：US12592428

申请日：2009-11-24

申请人： Masato Iyoki ,  Naoya Watanabe

发明人： Masato Iyoki ,  Naoya Watanabe

IPC分类号： G01B11/00 ,  G01B11/14 ,  G01B11/02

CPC分类号： G01Q20/04 ,  G01Q30/025 ,  G01Q70/14

摘要： A cantilever has a probe portion and a cantilever portion having a free end portion from which the probe portion extends. A displacement detecting portion detects a displacement of the cantilever portion according to an interaction between a sample and the probe portion. An electrode portion is connected to the displacement detecting portion. An insulation film is formed over at least one of the electrode portion and the displacement detecting portion. A functional coating in the form one of a conductive film, a magnetic film, and a film having a light intensity amplifying effect is disposed on the insulation film.

摘要翻译： 悬臂具有探针部分和具有探针部分延伸的自由端部的悬臂部分。 位移检测部根据样品与探针部之间的相互作用来检测悬臂部的位移。 电极部分连接到位移检测部分。 在电极部分和位移检测部分中的至少一个上形成绝缘膜。 导电膜，磁性膜和具有光强度放大效果的膜形式的功能性涂层设置在绝缘膜上。

公开(公告)号：US07945964B2

公开(公告)日：2011-05-17

申请号：US12415237

申请日：2009-03-31

申请人： Shigeru Wakiyama ,  Kenichi Akamatsu

发明人： Shigeru Wakiyama ,  Kenichi Akamatsu

IPC分类号： G12B21/08

CPC分类号： G01Q70/04

摘要： Provided are a structure of an apparatus for analysis, inspection, and measurement in which a support structure supporting a detection unit is resistant to disturbance, suppresses a reduction in resolution during large-sample measurement, and has high rigidity, and a probe microscope using the apparatus structure. The apparatus structure supporting the detection unit which is opposed to a sample which is located on a unit movable in at least one axis direction and is an object to be analyzed has an arch shape. In the apparatus structure having the arch shape and supporting the detection unit, a surface substantially perpendicular to a flat surface portion of a sample holder located immediately under the apparatus structure is formed. The detection unit is supported on the perpendicular surface. The arch-shaped apparatus structure is a curved structure consistent with a catenary curve.

摘要翻译： 提供一种用于分析，检查和测量的装置的结构，其中支撑检测单元的支撑结构抵抗干扰，抑制大样本测量期间的分辨率降低并且具有高刚性，并且使用探针显微镜 装置结构。 支撑检测单元的装置结构具有弓形状，该检测单元与位于能够沿至少一个轴向移动的单元上的样本相对的被检体的形状相对。 在具有拱形形状并支撑检测单元的装置结构中，形成基本上垂直于位于装置结构正下方的样品架的平坦表面部分的表面。 检测单元被支撑在垂直表面上。 拱形装置结构是与悬链线曲线一致的弯曲结构。

公开(公告)号：US07802916B2

公开(公告)日：2010-09-28

申请号：US11961944

申请日：2007-12-20

申请人： Yoshihiko Teramoto

发明人： Yoshihiko Teramoto

IPC分类号： G01K17/08 ,  G01N25/20

CPC分类号： G01N25/20

摘要： There is provided a differential scanning calorimeter for exactly measuring a calorie variation of the measured sample on the basis of the temperature difference between sample container and the reference container without the influence of the heat irregularity incoming from the surroundings and the noise components. The differential scanning calorimeter includes a heating furnace of an approximately H-shaped section having an approximately drum-shaped wall part and an approximately plate-shaped heat inflow part, a heater disposed outside the wall part so as to heat the heating furnace, a approximately bar-shaped heat-resistance member that is arranged along the center axis L of the wall part, that protrudes from both sides of the heat inflow part by an approximately equal length, that is made of a material heat conductivity lower than that of the material of the heating furnace, a sample container disposed at one end of the heat-resistance member, a reference container disposed at the other end of the heat-resistance member, and a differential heat flow detector measuring a difference between the temperature of the sample container and the temperature of the reference container as a measured value.

摘要翻译： 提供了差示扫描量热计，用于在不受来自周围环境的热不规则性和噪声成分的影响的情况下，基于样品容器和参考容器之间的温度差来精确测量测量样品的卡路里变化。 差示扫描量热计包括具有大致H形截面的加热炉，具有近似鼓形的壁部分和近似板状的热流入部分，设置在壁部外部以加热加热炉的加热器，大致 所述棒状耐热构件沿着所述壁部的中心轴线L配置，从所述热流入部的两侧突出大致相同的长度，所述长度相当于材料的导热率低于所述材料的导热率 的加热炉，设置在耐热构件的一端的样品容器，设置在耐热构件的另一端的参考容器和测量样品容器的温度之间的差异的差示热量检测器 和参考容器的温度作为测量值。

公开(公告)号：US07736893B2

公开(公告)日：2010-06-15

申请号：US11353603

申请日：2006-02-14

申请人： Masanao Munekane ,  Hiroyuki Wada ,  Kouji Iwasaki ,  Toshiaki Fujii ,  Takahiro Ochiya ,  Yusuke Yamamoto ,  Takumi Teratani

发明人： Masanao Munekane ,  Hiroyuki Wada ,  Kouji Iwasaki ,  Toshiaki Fujii ,  Takahiro Ochiya ,  Yusuke Yamamoto ,  Takumi Teratani

IPC分类号： C12N5/00

CPC分类号： G01N33/5088 ,  Y10T436/11

摘要： Objects to be achieved by the invention are to provide a nanobio device in which cultured cells are organized at a high-level in a state near in vivo, and to provide a method of using the nanobio device of imitative anatomy structure. The nanobio device of imitative anatomy structure of the invention is obtained by manufacturing a substrate with a bio-compatible substance and arranging a plurality of types of cells thereon in a desired array. A method of manufacturing a nanobio device in the invention includes a step of manufacturing a substrate for a nanobio device by a micromachine processing technique and a step of arranging a plurality of cultured cells on the substrate in a desired array with laser optical tweezers.

摘要翻译： 通过本发明实现的目的是提供一种纳米生物装置，其中培养细胞在体内接近的状态下组织在高水平，并提供使用模拟解剖结构的纳米装置的方法。 本发明的模拟解剖结构的纳米装置通过用生物相容性物质制造衬底并以期望的阵列布置多种类型的细胞而获得。 在本发明中制造纳米装置的方法包括通过微机械加工技术制造纳米装置用基板的步骤，以及使用激光光学镊子以期望的阵列在基板上排列多个培养细胞的步骤。

公开(公告)号：US07718981B2

公开(公告)日：2010-05-18

申请号：US12134919

申请日：2008-06-06

申请人： Haruo Takahashi ,  Yo Yamamoto ,  Toshiaki Fujii

发明人： Haruo Takahashi ,  Yo Yamamoto ,  Toshiaki Fujii

IPC分类号： G01N23/00

CPC分类号： H01J37/20 ,  H01J37/3056 ,  H01J2237/20242 ,  H01J2237/31745 ,  H01J2237/31749

摘要： There is provided a method of arranging, as a composite charged-particle beam system, a gas ion beam apparatus, an FIB and an SEM in order to efficiently prepare a TEM sample. The composite charged-particle beam system includes an FIB lens-barrel 1, an SEM lens-barrel 2, a gas ion beam lens-barrel 3, and a rotary sample stage 9 having an eucentric tilt mechanism and a rotating shaft 10 orthogonal to an eucentric tilt axis 8. In the composite charged-particle beam system, an arrangement is made such that a focused ion beam 4, an electron beam 5 and a gas ion beam 6 intersect at a single point, an axis of the FIB lens-barrel 1 and an axis of the SEM lens barrel 2 are orthogonal to the eucentric tilt axis 8, respectively, and the axis of the FIB lens-barrel 1, an axis of the gas ion beam lens-barrel 3 and the eucentric tilt axis 8 are in one plane.

摘要翻译： 提供了一种作为复合带电粒子束系统布置气体离子束装置，FIB和SEM以便有效地制备TEM样品的方法。 复合带电粒子束系统包括FIB透镜镜筒1，SEM透镜镜筒2，气体离子束透镜镜筒3以及具有偏心倾斜机构的旋转样品台9和与其垂直的旋转轴10 在复合带电粒子束系统中，使得聚焦离子束4，电子束5和气体离子束6在单点相交，FIB透镜镜筒的轴线 1并且SEM透镜镜筒2的轴线分别与偏心倾斜轴8正交，并且FIB透镜镜筒1的轴线，气体离子束透镜镜筒3的轴线和偏心倾斜轴线8是 在一架飞机上