- 专利标题： Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method
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申请号： US10778327申请日： 2004-02-17
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公开(公告)号： US07067805B2公开(公告)日： 2006-06-27
- 发明人: Kazutoshi Kajl , Takashi Aoyama , Shunroku Taya , Shigeto Isakozawa
- 申请人： Kazutoshi Kajl , Takashi Aoyama , Shunroku Taya , Shigeto Isakozawa
- 申请人地址： JP Tokyo
- 专利权人： Hitachi High-Technologies Corporation
- 当前专利权人： Hitachi High-Technologies Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Dickstein Shapiro Morin & Oshinsky LLP
- 优先权： JP2000-359475 20001121; JP2001-346019 20011112
- 主分类号： H01J47/00
- IPC分类号： H01J47/00
摘要：
An electron beam detector detects a peak of a spectrum, and when a peak position is deviated from a reference position on the electron beam detector, a controller for controlling an electron beam position on the electron beam detector is used to correct a deviation. An electron energy loss spectrum is measured while controlling correction a deviation between an electron beam position on a specimen, and a peak position of the spectrum, and a spectrum measuring with the electron beam detector.
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