Invention Grant
US07078292B2 Storage node contact forming method and structure for use in semiconductor memory
有权
用于半导体存储器的存储节点接触形成方法和结构
- Patent Title: Storage node contact forming method and structure for use in semiconductor memory
- Patent Title (中): 用于半导体存储器的存储节点接触形成方法和结构
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Application No.: US10875004Application Date: 2004-06-22
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Publication No.: US07078292B2Publication Date: 2006-07-18
- Inventor: Je-Min Park , Yoo-Sang Hwang , Cheol-Ju Yun
- Applicant: Je-Min Park , Yoo-Sang Hwang , Cheol-Ju Yun
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Marger Johnson & McCollom, P.C.
- Priority: KR10-2003-0042637 20030627
- Main IPC: H01L21/8242
- IPC: H01L21/8242

Abstract:
A storage node contact forming method and structure reduces the number of processes required by the conventional art and increases a critical dimension of a storage node to prevent a leaning phenomenon and reduce a manufacturing cost of semiconductor memory devices. The method includes preparing a semiconductor substrate that involves at least one contact pad contacted with an active region of a memory cell transistor through an insulation layer. The method also includes forming a storage node contact of T-shape, the storage node contact being composed of a lower region contacted with an upper part of the contact pad, and an upper region that is extended to a gate length direction of the memory cell transistor and that is formed as a size larger than a size of the lower region, in order to electrically connect the contact pad with a storage node to be formed in a later process.
Public/Granted literature
- US20040266101A1 Storage node contact forming method and structure for use in semiconductor memory Public/Granted day:2004-12-30
Information query
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