发明授权
- 专利标题: Device for holding a beam splitter element
- 专利标题(中): 用于保持分束器元件的装置
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申请号: US11109316申请日: 2005-04-19
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公开(公告)号: US07079331B2公开(公告)日: 2006-07-18
- 发明人: Ulrich Weber , Alexander Kohl , Hubert Holderer , Armin Schoeppach , Erwin Gaber , Winfried Kaiser , Reiner Garreis , Toralf Gruner , Chris Reed , Dragos Pariza , Mike Meehan
- 申请人: Ulrich Weber , Alexander Kohl , Hubert Holderer , Armin Schoeppach , Erwin Gaber , Winfried Kaiser , Reiner Garreis , Toralf Gruner , Chris Reed , Dragos Pariza , Mike Meehan
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 代理机构: Welsh & Katz, Ltd.
- 优先权: DE10248849 20021019
- 主分类号: G02B7/02
- IPC分类号: G02B7/02 ; G02B27/10 ; G02B27/14 ; G02B7/18 ; G02F1/01
摘要:
The invention relates to a device for holding a beam splitter element having an optically active beam splitter layer in an optical imaging device, the beam splitter element being connected to at least one support element that is fastened in the housing of the imaging device. The connection between the beam splitter element and said at least one support element is designed in such a way that the position of the beam splitter layer of the beam splitter element remains nearly constant relative to the housing independently of temperatures and of thermal stresses acting upon the beam splitter element.
公开/授权文献
- US20050248858A1 Device for holding a beam splitter element 公开/授权日:2005-11-10
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |