发明授权
US07083738B2 Method for creating inductive write head with steep shoulder at notch
失效
在凹口处创建具有陡肩的感应写头的方法
- 专利标题： Method for creating inductive write head with steep shoulder at notch
- 专利标题（中）： 在凹口处创建具有陡肩的感应写头的方法
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申请号： US10632631申请日： 2003-07-31
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公开(公告)号： US07083738B2公开(公告)日： 2006-08-01
- 发明人: Edward Hin Pong Lee , Aron Pentek , Wen-Chien David Hsiao
- 申请人： Edward Hin Pong Lee , Aron Pentek , Wen-Chien David Hsiao
- 申请人地址： NL Amsterdam
- 专利权人： Hitachi Global Storage Technologies Netherlands, B.V.
- 当前专利权人： Hitachi Global Storage Technologies Netherlands, B.V.
- 当前专利权人地址： NL Amsterdam
- 代理机构： Zilka-Kotab, PC
- 主分类号： B29D11/00
- IPC分类号： B29D11/00 ; H01L21/00
摘要：
A method for fabricating a magnetic head using a modified P1 cap process. A first pole is formed. A cap is formed above the first pole. A gap layer is formed above the cap. A second pole is formed above the gap layer. Exposed portions of the gap layer are removed. The cap and first pole are milled for creating a shoulder of the first pole tapered upwardly towards the cap. Another method for fabricating a magnetic head includes forming a first pole, forming a gap layer above the first pole, forming a second pole above the gap layer, forming a layer of photoresist above the second pole, patterning the photoresist such that the photoresist covers areas of the gap layer positioned towards the second pole, removing exposed portions of the gap layer, removing part of exposed portions of the first pole for forming steps in the first pole on opposite sides of the photoresist, removing the photoresist, and milling for creating a shoulder of the first pole tapering upwardly towards the cap.