发明授权
US07084030B2 Method of forming a non-volatile memory device having floating trap type memory cell
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形成具有浮动陷阱型存储单元的非易失性存储器件的方法
- 专利标题: Method of forming a non-volatile memory device having floating trap type memory cell
- 专利标题(中): 形成具有浮动陷阱型存储单元的非易失性存储器件的方法
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申请号: US10632496申请日: 2003-07-31
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公开(公告)号: US07084030B2公开(公告)日: 2006-08-01
- 发明人: Chang-Hyun Lee , Jung-Dal Choi , Wang-Chul Shin
- 申请人: Chang-Hyun Lee , Jung-Dal Choi , Wang-Chul Shin
- 申请人地址: KR Suown-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suown-si
- 代理机构: Marger Johnson & McCollom, P.C.
- 优先权: KR2001-47944 20010809
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L29/788
摘要:
A non-volatile memory device includes a cell region having a memory gate pattern with a charge storage layer, and a peripheral region having a high-voltage-type gate pattern, a low-voltage-type gate pattern, and a resistor pattern. To fabricate the above memory device, a device isolation layer is formed in a substrate. Gate insulating layers having difference thickness are formed in low-and high-voltage regions of the peripheral region, respectively. A first conductive layer is formed over substantially the entire surface of a gate insulating layer in the peripheral region. A triple layer including a tunneling insulating layer, a charge storage layer, and a blocking insulating layer and a second conductive layer are sequentially formed over substantially the entire surface of the substrate including the first conductive layer.
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