发明授权
- 专利标题： Group III-nitride layers with patterned surfaces
- 专利标题（中）： 具有图案化表面的III族氮化物层
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申请号： US11180350申请日： 2005-07-13
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公开(公告)号： US07084563B2公开(公告)日： 2006-08-01
- 发明人: Aref Chowdhury , Hock Min Ng , Richart Elliott Slusher
- 申请人： Aref Chowdhury , Hock Min Ng , Richart Elliott Slusher
- 申请人地址： US NJ Murray Hill
- 专利权人： Lucent Technologies Inc.
- 当前专利权人： Lucent Technologies Inc.
- 当前专利权人地址： US NJ Murray Hill
- 代理商 John F. McCabe
- 主分类号： H01J1/62
- IPC分类号： H01J1/62 ; H01L33/00
摘要：
An apparatus includes a crystalline substrate, a layer of a first group III-nitride located on a planar surface of the substrate, and a layer of a second group III-nitride located over the layer of the first group III-nitride. The first and second group III-nitrides have different alloy compositions. The layer of second group III-nitride may have a pattern of columnar holes or trenches therein. The apparatus may include a plurality of pyramidal field-emitters that include the second group III-nitride.
公开/授权文献
- US20050269593A1 Group III-nitride layers with patterned surfaces 公开/授权日：2005-12-08
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