Invention Grant
- Patent Title: Group III-nitride layers with patterned surfaces
- Patent Title (中): 具有图案化表面的III族氮化物层
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Application No.: US11180350Application Date: 2005-07-13
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Publication No.: US07084563B2Publication Date: 2006-08-01
- Inventor: Aref Chowdhury , Hock Min Ng , Richart Elliott Slusher
- Applicant: Aref Chowdhury , Hock Min Ng , Richart Elliott Slusher
- Applicant Address: US NJ Murray Hill
- Assignee: Lucent Technologies Inc.
- Current Assignee: Lucent Technologies Inc.
- Current Assignee Address: US NJ Murray Hill
- Agent John F. McCabe
- Main IPC: H01J1/62
- IPC: H01J1/62 ; H01L33/00
Abstract:
An apparatus includes a crystalline substrate, a layer of a first group III-nitride located on a planar surface of the substrate, and a layer of a second group III-nitride located over the layer of the first group III-nitride. The first and second group III-nitrides have different alloy compositions. The layer of second group III-nitride may have a pattern of columnar holes or trenches therein. The apparatus may include a plurality of pyramidal field-emitters that include the second group III-nitride.
Public/Granted literature
- US20050269593A1 Group III-nitride layers with patterned surfaces Public/Granted day:2005-12-08
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