发明授权
- 专利标题: Vision system
-
申请号: US10126493申请日: 2002-04-19
-
公开(公告)号: US07085622B2公开(公告)日: 2006-08-01
- 发明人: Iraj Sadighi , Jeff Hudgens , Michael Rice , Gary Wyka
- 申请人: Iraj Sadighi , Jeff Hudgens , Michael Rice , Gary Wyka
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Material, Inc.
- 当前专利权人: Applied Material, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson & Sheridan, LLP
- 主分类号: G06F19/00
- IPC分类号: G06F19/00
摘要:
Generally a method and apparatus for viewing images within a processing system is provided. In one embodiment, an apparatus includes a plate having a camera, transmitter and battery coupled thereto. The plate is adapted to be transported about a semiconductor processing system by a substrate transfer robot thereby allowing images within the system to be viewed remotely from the system. The viewed images may be used for system inspection and calibration of robot position, among other uses.
公开/授权文献
- US20030198376A1 Vision system 公开/授权日:2003-10-23
信息查询