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US07091481B2 Method and apparatus for plasma generation 有权
用于等离子体产生的方法和装置

Method and apparatus for plasma generation
摘要:
An RF-driven plasma source, including a pair of spaced-apart plasma electrodes, wherein the electrodes act as plates of a capacitor, the gas electrically discharges and creates a plasma of both positive and negative ions, in a clean process that enables efficient sample analysis, with preferred isolated sample photo-ionization, reduced-power operation and also including signal detection with modulated drive electronics.
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