发明授权
- 专利标题: Method and apparatus for plasma generation
- 专利标题(中): 用于等离子体产生的方法和装置
-
申请号: US10894861申请日: 2004-07-19
-
公开(公告)号: US07091481B2公开(公告)日: 2006-08-15
- 发明人: Raanan A. Miller , Erkinjon G. Nazarov , Evgeny Krylov , Gary A. Eiceman , John A. Wright , Stephen D. Kendig , C. James Morris , Douglas B. Cameron
- 申请人: Raanan A. Miller , Erkinjon G. Nazarov , Evgeny Krylov , Gary A. Eiceman , John A. Wright , Stephen D. Kendig , C. James Morris , Douglas B. Cameron
- 申请人地址: US MA Bedford
- 专利权人: Sionex Corporation
- 当前专利权人: Sionex Corporation
- 当前专利权人地址: US MA Bedford
- 代理机构: Fish & Neave IP Group Ropes & Gray LLP
- 主分类号: B01D59/44
- IPC分类号: B01D59/44
摘要:
An RF-driven plasma source, including a pair of spaced-apart plasma electrodes, wherein the electrodes act as plates of a capacitor, the gas electrically discharges and creates a plasma of both positive and negative ions, in a clean process that enables efficient sample analysis, with preferred isolated sample photo-ionization, reduced-power operation and also including signal detection with modulated drive electronics.
公开/授权文献
- US20050121607A1 Method and apparatus for plasma generation 公开/授权日:2005-06-09
信息查询