Invention Grant
- Patent Title: Coordinated polarization for shiny surface measurement
- Patent Title (中): 用于光泽表面测量的协调极化
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Application No.: US10673598Application Date: 2003-09-29
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Publication No.: US07092094B2Publication Date: 2006-08-15
- Inventor: Xiaoping Qian , Kevin George Harding
- Applicant: Xiaoping Qian , Kevin George Harding
- Applicant Address: US NY Niskayuna
- Assignee: General Electric Company
- Current Assignee: General Electric Company
- Current Assignee Address: US NY Niskayuna
- Agency: Fletcher Yoder
- Main IPC: G01J4/00
- IPC: G01J4/00

Abstract:
The present disclosure provides for an optical metrology system for scanning an object (106) having a shiny surface. The optical metrology system includes at least one light source (102) configured and adapted to emit a structured light pattern (L) against the surface of the object, at least one first polarizer (108) disposed between the light source and the object such that the light pattern passes therethrough, the first polarizer being configured and adapted to vary at least one of the plane of polarization and the polarization angle of the light pattern, at least one camera (124a–124c) configured and adapted to take images of the object, and at least one second polarizer disposed between the camera and the object, the second polarizer having a fixed orientation.
Public/Granted literature
- US20050068532A1 Coordinated polarization for shiny surface measurement Public/Granted day:2005-03-31
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