发明授权
US07095771B2 Implant damaged oxide insulating region in vertical cavity surface emitting laser 有权
植入物在垂直腔表面发射激光器中损坏氧化物绝缘区域

Implant damaged oxide insulating region in vertical cavity surface emitting laser
摘要:
Optical transmitters are disclosed, one example of which includes a vertical cavity surface emitting laser that includes a substrate upon which a lower mirror is disposed. In this example, a spacer is disposed between the lower mirror and an active region. Another spacer separates the active region and an upper mirror. The upper mirror includes an oxide insulating region that is damaged by ion implantation so that desirable effects are achieved with respect to lateral sheet resistance, and quantum well recombination centers in the active region.
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