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US07097707B2 GaN boule grown from liquid melt using GaN seed wafers 有权
使用GaN种子晶片从液体熔融生长GaN GaN坯

  • Patent Title: GaN boule grown from liquid melt using GaN seed wafers
  • Patent Title (中): 使用GaN种子晶片从液体熔融生长GaN GaN坯
  • Application No.: US10328223
    Application Date: 2002-12-23
  • Publication No.: US07097707B2
    Publication Date: 2006-08-29
  • Inventor: Xueping Xu
  • Applicant: Xueping Xu
  • Applicant Address: US NC Durham
  • Assignee: Cree, Inc.
  • Current Assignee: Cree, Inc.
  • Current Assignee Address: US NC Durham
  • Agency: Intellectual Property/Technology Law
  • Agent Vincent K. Gustafson; Julio A. Garceran
  • Main IPC: C30B15/04
  • IPC: C30B15/04
GaN boule grown from liquid melt using GaN seed wafers
Abstract:
A method of making a single crystal GaN boule, comprising contacting a GaN seed wafer with a GaN source environment under process conditions including a thermal gradient in the GaN source environment producing growth of gallium nitride on the GaN seed wafer, thereby forming the GaN boule. The GaN source environment in various implementations includes gallium melt in an ambient atmosphere of nitrogen or ammonia, or alternatively, supercritical ammonia containing solubilized GaN. The method produces single crystal GaN boules >10 millimeters in diameter, of device quality suitable for production of GaN wafers useful in the fabrication of microelectronic, optoelectronic and microelectromechanical devices and device precursor structures therefor.
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