- 专利标题: Method for flip chip bonding by utilizing an interposer with embedded bumps
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申请号: US11136181申请日: 2005-05-24
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公开(公告)号: US07098071B2公开(公告)日: 2006-08-29
- 发明人: Ming-Lun Ho , Chih-Ming Chung
- 申请人: Ming-Lun Ho , Chih-Ming Chung
- 申请人地址: TW Kaohsiung
- 专利权人: Advanced Semiconductor Engineering, Inc.
- 当前专利权人: Advanced Semiconductor Engineering, Inc.
- 当前专利权人地址: TW Kaohsiung
- 代理机构: Ladas & Parry LLP
- 优先权: TW93132044A 20041021
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
The present invention relates to a method for flip chip bonding by utilizing an interposer with embedded bumps. The method comprises (a) providing a first element having a first surface; (b) forming an interposer onto the first surface; (c) forming a plurality of openings on the interposer; (d) forming a plurality of bumps in the openings, wherein the height of the bumps is smaller than the depth of the openings; (e) providing a second element having a plurality of pre-solders; and (f) bonding the first surface onto the second element, so that the pre-solders are disposed in the openings and in contact with the bumps. As a result, the self-alignment between the pre-solders and the bumps can avoid the shift between the first element and the second element.
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