发明授权
US07098433B2 Apparatus and method for estimating and adjusting deviations in an optical system based on wavefront aberrations ascribable to misalignment
有权
基于由于不对准引起的波前像差来估计和调整光学系统中的偏差的装置和方法
- 专利标题: Apparatus and method for estimating and adjusting deviations in an optical system based on wavefront aberrations ascribable to misalignment
- 专利标题(中): 基于由于不对准引起的波前像差来估计和调整光学系统中的偏差的装置和方法
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申请号: US10415936申请日: 2002-01-17
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公开(公告)号: US07098433B2公开(公告)日: 2006-08-29
- 发明人: Jiro Suzuki , Toshiyuki Ando , Hiroshi Suzuki , Shusou Wadaka , Yoshihito Hirano , Izumi Mikami , Tadashi Matsushita
- 申请人: Jiro Suzuki , Toshiyuki Ando , Hiroshi Suzuki , Shusou Wadaka , Yoshihito Hirano , Izumi Mikami , Tadashi Matsushita
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2001-283674 20010918
- 国际申请: PCT/JP02/00284 WO 20020117
- 国际公布: WO03/025537 WO 20030327
- 主分类号: G01J1/20
- IPC分类号: G01J1/20
摘要:
An optical system deviation estimating apparatus includes an erected/inverted attitude setting means 9 for changing dispositional attitude of an optical system under test, a non-interferometric type wavefront measuring means 10 for measuring wavefronts at the attitudes as set up without resorting to interference phenomenon of light, a polynomial approximation means 15 for expanding measured wavefront values determined by the non-interferometric type wavefront measuring means 10 to a polynomial, an averaging arithmetic means 11 for averaging the measured values derived from output of the non-interferometric type wavefront measuring means 10 or alternatively arithmetic values derived from output of the polynomial approximation means 15, and a polynomial specific coefficient extraction arithmetic means 16 for extracting specific coefficient values of the polynomial.
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