Invention Grant
US07099729B2 Semiconductor process and yield analysis integrated real-time management method 失效
半导体工艺和产量分析集成实时管理方法

Semiconductor process and yield analysis integrated real-time management method
Abstract:
A semiconductor process and yield analysis integrated real-time management method comprises inspecting a plurality of semiconductor products with a plurality of items to generate and record a plurality of inspecting results during semiconductor process, classifying the semiconductor products as a plurality of groups with a default rule to generate and record an initial data in a database, indexing a plurality of semiconductor product groups and the corresponding initial data from the database by a default product rule and parameter to calculate a corresponding analysis result, and displaying the analysis result according to the indexed semiconductor product groups and the initial data.
Information query
Patent Agency Ranking
0/0