Invention Grant
- Patent Title: Semiconductor process and yield analysis integrated real-time management method
- Patent Title (中): 半导体工艺和产量分析集成实时管理方法
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Application No.: US10708277Application Date: 2004-02-20
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Publication No.: US07099729B2Publication Date: 2006-08-29
- Inventor: Hung-En Tai , Chien-Chung Chen , Sheng-Jen Wang
- Applicant: Hung-En Tai , Chien-Chung Chen , Sheng-Jen Wang
- Applicant Address: TW Hsin-Chu
- Assignee: Powerchip Semiconductor Corp.
- Current Assignee: Powerchip Semiconductor Corp.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
A semiconductor process and yield analysis integrated real-time management method comprises inspecting a plurality of semiconductor products with a plurality of items to generate and record a plurality of inspecting results during semiconductor process, classifying the semiconductor products as a plurality of groups with a default rule to generate and record an initial data in a database, indexing a plurality of semiconductor product groups and the corresponding initial data from the database by a default product rule and parameter to calculate a corresponding analysis result, and displaying the analysis result according to the indexed semiconductor product groups and the initial data.
Public/Granted literature
- US20050187648A1 SEMICONDUCTOR PROCESS AND YIELD ANALYSIS INTEGRATED REAL-TIME MANAGEMENT METHOD Public/Granted day:2005-08-25
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