发明授权
- 专利标题: Fluorinated surfactants for aqueous acid etch solutions
- 专利标题(中): 氟化表面活性剂用于酸性蚀刻溶液
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申请号: US11081196申请日: 2005-03-16
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公开(公告)号: US07101492B2公开(公告)日: 2006-09-05
- 发明人: Michael J. Parent , Patricia M. Savu , Richard M. Flynn , Zhongxing Zhang , William M. Lamanna , Zai-Ming Qiu , George G. I. Moore
- 申请人: Michael J. Parent , Patricia M. Savu , Richard M. Flynn , Zhongxing Zhang , William M. Lamanna , Zai-Ming Qiu , George G. I. Moore
- 申请人地址: US MN St. Paul
- 专利权人: 3M Innovative Properties Company
- 当前专利权人: 3M Innovative Properties Company
- 当前专利权人地址: US MN St. Paul
- 代理商 Kent S. Kokko
- 主分类号: C09K13/00
- IPC分类号: C09K13/00
摘要:
Novel aqueous, acid etch solutions comprising a fluorinated surfactant are provided. The etch solutions are used with a wide variety of substrates, for example, in the etching of silicon oxide-containing substrates.
公开/授权文献
- US20050181620A1 Fluorinated surfactants for aqueous acid etch solutions 公开/授权日:2005-08-18
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