发明授权
- 专利标题: Hybrid type onium salt
- 专利标题(中): 混合型鎓盐
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申请号: US10494481申请日: 2002-11-01
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公开(公告)号: US07101918B2公开(公告)日: 2006-09-05
- 发明人: Masami Ishihara , Tsuneaki Maesawa , Yoji Urano
- 申请人: Masami Ishihara , Tsuneaki Maesawa , Yoji Urano
- 申请人地址: JP Osaka
- 专利权人: Wako Pure Chemical Industries, Ltd.
- 当前专利权人: Wako Pure Chemical Industries, Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: Hamre, Schumann, Mueller & Larson, P.C.
- 优先权: JP2001-340144 20011106
- 国际申请: PCT/JP02/11446 WO 20021101
- 国际公布: WO03/040090 WO 20030515
- 主分类号: C08F2/50
- IPC分类号: C08F2/50 ; G03F7/04 ; C03C381/12
摘要:
The present invention relates to a hybrid type onium salt having an iodonium salt and a sulfonium salt in the molecule, Useful, for example, as a cationic type photopolymerization initiator and an acid generator for a chemically amplified resist and provides a hybrid type onium salt shown by the general formula [1]: and R4 is an alkyl group, an alkenyl group, an aryl group or an aralkyl group, which may have a substituent selected from the group consisting of a halogen atom, an alkyl group, a haloalkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group and an amino group which may be substituted or a group shown by the general formula [2]: and a polymerization initiator or an acid generator, comprising said onium salt.
公开/授权文献
- US20050020710A1 Hybrid onium salt 公开/授权日:2005-01-27
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