发明授权
US07103439B1 Method and apparatus for initializing tool controllers based on tool event data
有权
基于工具事件数据初始化刀具控制器的方法和装置
- 专利标题： Method and apparatus for initializing tool controllers based on tool event data
- 专利标题（中）： 基于工具事件数据初始化刀具控制器的方法和装置
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申请号： US09824301申请日： 2001-04-02
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公开(公告)号： US07103439B1公开(公告)日： 2006-09-05
- 发明人: Christopher A. Bode , Alexander J. Pasadyn , Anthony J. Toprac , Joyce S. Oey Hewett , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
- 申请人： Christopher A. Bode , Alexander J. Pasadyn , Anthony J. Toprac , Joyce S. Oey Hewett , Anastasia Oshelski Peterson , Thomas J. Sonderman , Michael L. Miller
- 申请人地址： US TX Austin
- 专利权人： Advanced Micro Devices, Inc.
- 当前专利权人： Advanced Micro Devices, Inc.
- 当前专利权人地址： US TX Austin
- 代理机构： Williams, Morgan and Amerson
- 主分类号： G06F19/00
- IPC分类号： G06F19/00
摘要：
A method for initializing process controllers based on tool event data includes providing a tool having a process controller adapted to employ a control model to control an operating recipe of the tool; receiving a tool event notification; and initializing the control model in response to receiving the tool event notification. A manufacturing system includes a tool and a process controller. The tool is adapted to process wafers in accordance with an operating recipe. The process controller is adapted to employ a control model to control the operating recipe in accordance with a control algorithm. The process controller is further adapted to receive a tool event notification and initialize the control model in response to receiving the tool event notification.