发明授权
- 专利标题： Optical device having movable portion and method for manufacturing the same
- 专利标题（中）： 具有可动部的光学装置及其制造方法
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申请号： US10752588申请日： 2004-01-08
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公开(公告)号： US07105902B2公开(公告)日： 2006-09-12
- 发明人: Kazushi Asami , Kazuhiko Kano , Tetsuo Y Shioka
- 申请人： Kazushi Asami , Kazuhiko Kano , Tetsuo Y Shioka
- 申请人地址： JP Kariya
- 专利权人： Denso Corporation
- 当前专利权人： Denso Corporation
- 当前专利权人地址： JP Kariya
- 代理机构： Posz Law Group, PLC
- 优先权： JP2003-032721 20030210
- 主分类号： H01L29/82
- IPC分类号： H01L29/82
摘要：
An optical device includes a semiconductor substrate having an opening, a support member disposed on the substrate, and a movable portion disposed on the opening of the substrate. The movable portion is supported by the support member so that the movable portion is movable. The device has a large scanning angle. Further, the device can scan widely at any frequency.