发明授权
US07105955B2 Lithographic apparatus, coil assembly, positioning device including a coil assembly, and device manufacturing method
失效
平版印刷装置，线圈组件，包括线圈组件的定位装置和装置制造方法
- 专利标题： Lithographic apparatus, coil assembly, positioning device including a coil assembly, and device manufacturing method
- 专利标题（中）： 平版印刷装置，线圈组件，包括线圈组件的定位装置和装置制造方法
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申请号： US10825224申请日： 2004-04-16
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公开(公告)号： US07105955B2公开(公告)日： 2006-09-12
- 发明人: Johannes Petrus Martinus Bernardus Vermeulen , Henricus Wilhelmus Aloysius Janssen , Erik Roelof Loopstra
- 申请人： Johannes Petrus Martinus Bernardus Vermeulen , Henricus Wilhelmus Aloysius Janssen , Erik Roelof Loopstra
- 申请人地址： NL Veldhoven
- 专利权人： ASML Netherlands B.V.
- 当前专利权人： ASML Netherlands B.V.
- 当前专利权人地址： NL Veldhoven
- 代理机构： Pillsbury Winthrop Shaw Pittman, LLP
- 主分类号： H02K41/02
- IPC分类号： H02K41/02 ; H02K3/04 ; G03B27/52
摘要：
A coil assembly has at least two coils which are arranged in a common plane, and partially overlap in crossover sections of the coils. The crossover sections have a reduced height, which results in a reduced total height of the coil assembly. This leads to a more compact coil assembly, and hence to better dynamic characteristics of a positioning device in which the coil assembly is applied.
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