Invention Grant
- Patent Title: Structure and method for a microelectromechanic cylindrical reflective diffraction grating spectrophotometer
- Patent Title (中): 微机电圆柱反射衍射光栅分光光度计的结构与方法
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Application No.: US10672207Application Date: 2003-09-26
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Publication No.: US07106441B2Publication Date: 2006-09-12
- Inventor: Decai Sun , Joel A. Kubby , Jingkuang Chen , Alex T. Tran , Patrick Y. Maeda
- Applicant: Decai Sun , Joel A. Kubby , Jingkuang Chen , Alex T. Tran , Patrick Y. Maeda
- Applicant Address: US CT Stamford
- Assignee: Xerox Corporation
- Current Assignee: Xerox Corporation
- Current Assignee Address: US CT Stamford
- Main IPC: G01J3/20
- IPC: G01J3/20
Abstract:
A tunable microelectromechanical (MEMS) spectrophotometer with a rotating cylindrical reflective diffraction grating is integrated with a photodetector and an optical fiber light source on a Rowland circle on a monolithic silicon substrate.
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