发明授权
- 专利标题: Plating device and plating method
- 专利标题(中): 电镀装置及电镀方法
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申请号: US10468781申请日: 2002-02-20
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公开(公告)号: US07112268B2公开(公告)日: 2006-09-26
- 发明人: Wataru Okase , Takenobu Matsuo
- 申请人: Wataru Okase , Takenobu Matsuo
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Pillsbury Winthrop Shaw Pittman LLP
- 优先权: JP2001-051122 20010226
- 国际申请: PCT/JP02/01458 WO 20020220
- 国际公布: WO02/068730 WO 20020906
- 主分类号: C25D7/12
- IPC分类号: C25D7/12 ; C25D17/06 ; C25D17/00 ; C25D17/02
摘要:
A plating device and a plating method are provided that are capable of enhancing uniformity in plating on a treatment surface of an object to be treated. The plating device includes: a plating solution bath capable of storing a plating solution and having a first electrode to be immersed in the stored plating solution; a treatment object holding mechanism configured to hold the object to be treated to bring the treatment surface thereof into contact with the plating solution; and a contact disposed in the treatment object holding mechanism and brought into electrical contact with a peripheral edge of the object to be treated so as to make a conductive layer on the treatment surface, which is brought into contact with the plating solution, serve as a second electrode, the contact having a bellows construction or a spring construction movable in a direction facing the object to be treated, and the treatment object holding mechanism being capable of holding the object to be treated while the bellows construction or the like in the contact is in a compressed state. The contact itself is formed as a pliable structure instead of a rigid structure, thereby keeping the contact resistance constant by fluctuation in contact pressure which is controlled to be small even when a slight displacement of the compression direction occurs.
公开/授权文献
- US20040074763A1 Plating device and plating method 公开/授权日:2004-04-22
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