Invention Grant
- Patent Title: Thin channel MOSFET with source/drain stressors
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Application No.: US10939923Application Date: 2004-09-13
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Publication No.: US07112848B2Publication Date: 2006-09-26
- Inventor: Wen-Chin Lee
- Applicant: Wen-Chin Lee
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L27/01
- IPC: H01L27/01 ; H01L27/12 ; H01L31/0392

Abstract:
Methods of manufacturing microelectronic device including, in one embodiment, forming a gate electrode over a substrate having an insulating layer interposing a bulk semiconductor portion and a thin semiconductor layer, and removing at least a portion of the thin semiconductor and insulating layers, thereby defining a pedestal comprising a portion of the thin semiconductor and insulating layers. Source/drain stressors are then formed contacting the source/drain extensions on opposing sides of the pedestal and substantially spanning a height no less than the pedestal.
Public/Granted literature
- US20060054968A1 Thin channel MOSFET with source/drain stressors Public/Granted day:2006-03-16
Information query
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