Invention Grant
- Patent Title: Microdischarge devices and arrays having tapered microcavities
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Application No.: US10047469Application Date: 2002-01-15
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Publication No.: US07112918B2Publication Date: 2006-09-26
- Inventor: J. Gary Eden , Sung-Jin Park , Jack Chen , Chang Liu
- Applicant: J. Gary Eden , Sung-Jin Park , Jack Chen , Chang Liu
- Applicant Address: US IL Urbana
- Assignee: The Board of Trustees of the University of Illinois
- Current Assignee: The Board of Trustees of the University of Illinois
- Current Assignee Address: US IL Urbana
- Agency: Greer, Burns & Crain, Ltd.
- Main IPC: H01J1/00
- IPC: H01J1/00
Abstract:
A microdischarge device has a semiconductor layer, an intermediate layer, and a conductive layer. A tapered cavity is disposed in at least the semiconductor layer.
Public/Granted literature
- US20030132693A1 Microdischarge devices and arrays having tapered microcavities Public/Granted day:2003-07-17
Information query
