公开(公告)号：US08890409B2

公开(公告)日：2014-11-18

申请号：US12991237

申请日：2009-05-14

申请人： J. Gary Eden ,  Sung-Jin Park ,  Taek-Lim Kim ,  Kwang-Soo Kim

发明人： J. Gary Eden ,  Sung-Jin Park ,  Taek-Lim Kim ,  Kwang-Soo Kim

IPC分类号： H01J17/49 ,  H01J9/26 ,  H01J9/32 ,  H05H1/24 ,  H01J61/86 ,  H01J11/36

CPC分类号： H05H1/24 ,  H01J11/36 ,  H01J61/86 ,  H05H1/2406 ,  H05H2001/2418

摘要： An array of microcavity plasma devices is formed in a unitary sheet of oxide with embedded microcavities or microchannels and encapsulated metal driving electrodes isolated by oxide from the microcavities or microchannels and arranged so as to generate sustain a plasma in the embedded microcavities or microchannels upon application of time-varying voltage when a plasma medium is contained in the microcavities or microchannels.

摘要翻译： 微腔等离子体装置的阵列形成在具有嵌入的微腔或微通道的一体的氧化物片材中，并且被封装的金属驱动电极由氧化物从微腔或微通道分离，并被布置成在施加了微腔或微通道时在嵌入的微腔或微通道中产生维持等离子体 当等离子体介质包含在微通道或微通道中时，具有时变电压。

公开(公告)号：US08497631B2

公开(公告)日：2013-07-30

申请号：US11698264

申请日：2007-01-23

申请人： J. Gary Eden ,  Sung-Jin Park ,  Meng Lu ,  Brian Cunningham

发明人： J. Gary Eden ,  Sung-Jin Park ,  Meng Lu ,  Brian Cunningham

IPC分类号： H01J17/49

CPC分类号： B29C35/02 ,  B29C65/70 ,  H01J9/245 ,  H01J11/18 ,  H01J65/046 ,  H05H1/2406 ,  H05H2001/2412

摘要： A microplasma device includes a substrate and either or both of a microchannel or microcavity defined in a polymer layer supported by the substrate. Electrodes arranged with respect to the polymer material can excite a plasma in a discharge medium contained in the microchannel or the microcavity or both. A method of forming a microplasma device places a curable polymer material between a mold having a negative volume impression of microcavities and/or microchannels and a substrate. The polymer is cured and then the mold is separated from the solid polymer.

摘要翻译： 微血浆装置包括基质和限定在由基底支撑的聚合物层中的微通道或微腔中的任一者或两者。 相对于聚合物材料布置的电极可以在包含在微通道或微腔中的放电介质中或两者中激发等离子体。 形成微等离子体装置的方法将可固化的聚合物材料放置在具有负的体积的微腔和/或微通道的印模和基底之间。 聚合物固化，然后将模具与固体聚合物分离。

公开(公告)号：US08404558B2

公开(公告)日：2013-03-26

申请号：US13188712

申请日：2011-07-22

申请人： J. Gary Eden ,  Sung-Jin Park ,  Kwang-Soo Kim

发明人： J. Gary Eden ,  Sung-Jin Park ,  Kwang-Soo Kim

IPC分类号： H01L33/16 ,  H01J17/04 ,  H01J17/49

CPC分类号： H01J11/18 ,  G09F9/313

摘要： In a preferred method of formation embodiment, a metal foil or film is obtained or formed with micro-holes. The foil is anodized to form metal oxide. One or more self-patterned metal electrodes are automatically formed and buried in the metal oxide created by the anodization process. The electrodes form in a closed circumference around each microcavity in a plane(s) transverse to the microcavity axis, and can be electrically isolated or connected. Preferred embodiments provide inexpensive microplasma device electrode structures and a fabrication method for realizing microplasma arrays that are lightweight and scalable to large areas. Electrodes buried in metal oxide and complex patterns of electrodes can also be formed without reference to microplasma devices—that is, for general electrical circuitry.

摘要翻译： 在优选的形成实施方案中，获得或形成有微孔的金属箔或膜。 箔被阳极化以形成金属氧化物。 自动形成一个或多个自图形金属电极并将其埋在通过阳极氧化处理产生的金属氧化物中。 电极在横截于微腔轴的平面中围绕每个微腔的封闭圆周形成，并且可以电隔离或连接。 优选实施例提供廉价的微型器件电极结构和用于实现轻量级并且可扩展到大面积的微等离子体阵列的制造方法。 掩埋在金属氧化物中的电极和电极的复杂图案也可以形成，而不参考微等离子体装置，即用于一般的电路。

公开(公告)号：US20130071297A1

公开(公告)日：2013-03-21

申请号：US13527842

申请日：2012-06-20

申请人： J. Gary Eden ,  Sung-Jin Park ,  Jin Hoon Cho ,  Seung Hoon Sung ,  Min Hwan Kim

发明人： J. Gary Eden ,  Sung-Jin Park ,  Jin Hoon Cho ,  Seung Hoon Sung ,  Min Hwan Kim

IPC分类号： H01J37/32 ,  C25D11/02

CPC分类号： B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00842 ,  B01J2219/00853 ,  B01J2219/00891 ,  C01B13/115 ,  C25D11/02 ,  C25D11/022 ,  C25D11/026 ,  C25D11/12 ,  C25D11/18 ,  C25D11/26 ,  H01J11/18 ,  H01J11/22 ,  H01J11/34 ,  H01J17/066 ,  H01J17/16 ,  H01J37/32055 ,  H05H2001/2412 ,  H05H2001/2418

摘要： A microplasma device includes a microcavity or microchannel defined at least partially within a thick metal oxide layer consisting essentially of defect free oxide. Electrodes are arranged with respect to the microcavity or microchannel to stimulate plasma generation in said microcavity or microchannel. At least one of the electrodes is encapsulated within the thick metal oxide layer. A method of fabricating a microcavity or microchannel plasma device includes anodizing a flat or gently curved or gently sloped metal substrate to form a thick layer of metal oxide consisting essentially of nanopores that are perpendicular to the surface of the metal substrate. Material removal is conducted to remove metal oxide material to form a microcavity or microchannel in the thick layer of metal oxide.

摘要翻译： 微型装置包括至少部分地在基本上由无缺陷氧化物组成的厚金属氧化物层内限定的微腔或微通道。 电极相对于微腔或微通道布置以刺激所述微腔或微通道中的血浆产生。 至少一个电极被封装在厚的金属氧化物层内。 一种制造微腔或微通道等离子体装置的方法包括阳极氧化平坦或轻柔地弯曲或缓慢倾斜的金属基底，以形成基本上由纳米孔组成的厚层，金属氧化物垂直于金属基底的表面。 进行材料去除以除去金属氧化物材料以在金属氧化物的厚层中形成微腔或微通道。

公开(公告)号：US20110260609A1

公开(公告)日：2011-10-27

申请号：US12682973

申请日：2008-10-27

申请人： J. Gary Eden ,  Sung-Jin Park ,  Andrew J. Price ,  Jason D. Readle ,  Clark J. Wagner

发明人： J. Gary Eden ,  Sung-Jin Park ,  Andrew J. Price ,  Jason D. Readle ,  Clark J. Wagner

IPC分类号： H01J17/49 ,  C23C28/04 ,  B65B63/08 ,  C25D11/02

CPC分类号： H01J17/49 ,  H01J61/06 ,  H01J61/305 ,  H01J61/52 ,  H01J61/82

摘要： Embodiments of the invention provide for large arrays of microcavity plasma devices that can be made inexpensively, and can produce large area but thin displays or lighting sources Interwoven metal wire mesh, such as interwoven Al mesh, consists of two sets of wires which are interwoven in such a way that the two wire sets cross each other, typically at πght angles (90 degrees) although other patterns are also available Fabrication is accomplished with a simple and inexpensive wet chemical etching process The wires in each set are spaced from one another such that the finished mesh forms an array of openings that can be, for example, square, rectangular or diamond-shaped The size of the openings or microcavities is a function of the diameter of the wires in the mesh and the spacing between the wires in the mesh used to form the array of microcavity plasma devices.

摘要翻译： 本发明的实施例提供了可以廉价制造并且可以生产大面积但薄的显示器或照明源的微腔等离子体装置的大阵列。交织的金属丝网如交织的Al网由两组电线组成， 尽管其他图案也是可用的，这两种线组彼此交叉的方式，通常是直角（90度）通过简单和便宜的湿式化学蚀刻工艺完成。每组中的导线彼此间隔开，使得 完成的网格形成可以是例如正方形，矩形或菱形的开口阵列。开口或微腔的尺寸是网中线的直径和网中线之间的间距的函数 用于形成微腔等离子体装置阵列。

公开(公告)号：US20110148282A1

公开(公告)日：2011-06-23

申请号：US12640884

申请日：2009-12-17

申请人： J. Gary Eden ,  Sung-Jin Park ,  Jason D. Readle ,  Jekwon Yoon ,  Andrew Price ,  Jeffrey Putney

发明人： J. Gary Eden ,  Sung-Jin Park ,  Jason D. Readle ,  Jekwon Yoon ,  Andrew Price ,  Jeffrey Putney

IPC分类号： H01J61/30 ,  H01J61/42 ,  H01J9/38

CPC分类号： H01J17/49 ,  H01J17/16 ,  H01J65/046

摘要： Preferred embodiments of the invention provide microcavity plasma lamps having a plurality of metal and metal oxide layers defining a plurality of arrays of microcavities and encapsulated thin metal electrodes. Packaging encloses the plurality of metal and metal oxide layers in plasma medium. The metal and metal oxide layers are configured and arranged to vary the electric field strength and total gas pressure (E/p) in the lamp. The invention also provides methods of manufacturing a microcavity plasma lamp that simultaneously evacuate the volume within the packaging and a volume surrounding the packaging to maintain an insignificant or zero pressure differential across the packaging. The packaging is backfilled with a plasma medium while also maintaining an insignificant or zero pressure differential across the packaging.

摘要翻译： 本发明的优选实施例提供了具有限定多个微腔阵列和封装的薄金属电极的多个金属和金属氧化物层的微腔等离子体灯。 包装在等离子体介质中包围多个金属和金属氧化物层。 金属和金属氧化物层被配置和布置成改变灯中的电场强度和总气体压力（E / p）。 本发明还提供了制造微腔等离子体灯的方法，其同时抽空包装内的体积和围绕包装的体积，以保持整个包装上的微不足道或零压差。 包装用等离子体介质回填，同时在整个包装上保持不显着或零压差。

公开(公告)号：US20100072893A1

公开(公告)日：2010-03-25

申请号：US12235796

申请日：2008-09-23

申请人： J. Gary Eden ,  Sung-Jin Park ,  Seung Hoon Sung

发明人： J. Gary Eden ,  Sung-Jin Park ,  Seung Hoon Sung

IPC分类号： H01J17/49 ,  H01J9/24

CPC分类号： H01J65/046 ,  H01J9/241 ,  H01J11/18

摘要： The invention provides microcavity plasma devices and arrays that are formed in layers that also seal the plasma medium, i.e., gas(es) and/or vapors. No separate packaging layers are required and additional packaging can be omitted if it is desirable to do so. A preferred microcavity plasma device includes first and second thin layers that are joined together. A half ellipsoid microcavity or plurality of half ellipsoid microcavities is defined in one or both of the first and second thin layers, and electrodes are arranged with respect to the microcavity to excite a plasma within said microcavities upon application of a predetermined voltage to the electrodes. A method for forming a microcavity plasma device having a plurality of half or full ellipsoid microcavities in one or both of first and second thin layers is also provided by a preferred embodiment. The method includes defining a pattern of protective polymer on the first thin layer. Powder blasting forms half ellipsoid microcavities in the first thin layer. The second thin layer is joined to the first layer. The patterning can be conducted lithographically or can be conduced with a simple screen.

摘要翻译： 本发明提供了形成为也密封等离子体介质即气体和/或蒸汽的层的微腔等离子体装置和阵列。 不需要单独的包装层，如果要这样做，可以省略额外的包装。 优选的微腔等离子体装置包括连接在一起的第一和第二薄层。 半椭圆形微腔或多个半椭圆形微腔被限定在第一和第二薄层中的一个或两个中，并且相对于微腔布置电极，以在对电极施加预定电压时在所述微腔内激发等离子体。 优选实施例也提供了一种在第一和第二薄层中的一个或两个中形成具有多个半或全椭圆形微腔的微腔等离子体装置的方法。 该方法包括在第一薄层上限定保护性聚合物的图案。 粉末喷射在第一薄层中形成半椭圆形微腔。 第二薄层连接到第一层。 图案化可以光刻地进行，或者可以用简单的屏幕进行。

公开(公告)号：US07638937B2

公开(公告)日：2009-12-29

申请号：US11070100

申请日：2005-03-01

申请人： J. Gary Eden ,  Sung-Jin Park ,  Clark J. Wagner

发明人： J. Gary Eden ,  Sung-Jin Park ,  Clark J. Wagner

IPC分类号： H01J63/04 ,  H01J61/09 ,  H01J13/46

CPC分类号： H01J17/49 ,  H01J1/025 ,  H01J9/00 ,  H01J9/02 ,  H01J25/50 ,  H01J61/09 ,  H01J61/305 ,  H01J61/62 ,  H01J63/04 ,  H01J65/046

摘要： Roll to roll fabrication methods of the invention enable low cost mass production of microdischarge devices and arrays. A preferred embodiment method of fabricating a discharge device includes providing a dielectric layer sheet, a first electrode, and a second electrode sheet. A cavity is provided through at least a portion of the dielectric layer sheet. At least the dielectric layer sheet and second electrode sheet are rolled together. Another preferred embodiment method of fabrication a discharge device includes method of fabricating a discharge device includes providing a dielectric layer sheet and a cavity through at least a portion of the dielectric layer sheet. A first electrode is disposed as a film of conducting material on the dielectric layer sheet around a rim of the cavity. A second electrode sheet is provided. The dielectric layer sheet is rolled together with first electrode and second electrode sheets.

摘要翻译： 本发明的卷对卷制造方法能够实现微量放电装置和阵列的低成本批量生产。 制造放电装置的优选实施例的方法包括提供介电层片，第一电极和第二电极片。 通过介电层片材的至少一部分提供空腔。 至少将电介质层片和第二电极片卷成一体。 制造放电器件的另一个优选实施例的方法包括制造放电器件的方法包括通过至少一部分电介质层片提供介电层片和空腔。 第一电极作为导电材料的膜设置在该空腔的边缘周围的介电层片上。 提供第二电极片。 介电层片与第一电极和第二电极片一起卷绕。

公开(公告)号：US07372202B2

公开(公告)日：2008-05-13

申请号：US10829666

申请日：2004-04-22

申请人： J. Gary Eden ,  Ju Gao ,  Sung-o Kim

发明人： J. Gary Eden ,  Ju Gao ,  Sung-o Kim

IPC分类号： H01J17/49 ,  H01J17/04

CPC分类号： H01J17/40

摘要： The invention is directed to a method and apparatus for phase-locking microdischarge device arrays and an ac, rf, or pulse-excited microdischarge. The invention provides output from a non-laser optical source that is a phase-locked array of microdischarges formed of microdischarge cavities containing discharge filler and excitation electrodes. In exemplary embodiments, entire arrays of microdischarge device optical emitters that are not lasers can be fabricated into a surface area having a largest dimension smaller than the coherence length of at least one of the emissions produced by the individual elements. In other embodiments, arrays of microdischarge devices configured in a Fresnel pattern constitute a lens suitable for both producing and focusing light.

摘要翻译： 本发明涉及一种用于相位锁定微放电器件阵列和ac，rf或脉冲激发微放电的方法和装置。 本发明提供了非激光光源的输出，该非激光光源是由包含放电填料和激发电极的微放电腔形成的微放电的锁相阵列。 在示例性实施例中，不是激光器的整个微放电器件光发射器阵列可以被制造成具有比由各个元件产生的至少一个发射的相干长度小的最大尺寸的表面区域。 在其它实施例中，以菲涅耳图案配置的微放电器件阵列构成适于产生和聚焦光的透镜。

公开(公告)号：US07126266B2

公开(公告)日：2006-10-24

申请号：US10891417

申请日：2004-07-14

申请人： Sung-Jin Park ,  J. Gary Eden ,  Kyung-Ho Park

发明人： Sung-Jin Park ,  J. Gary Eden ,  Kyung-Ho Park

IPC分类号： H01J1/62

CPC分类号： H01J1/025 ,  B82Y10/00 ,  H01J3/025 ,  H01J17/066 ,  H01J63/02 ,  H01J2201/30469 ,  H01J2217/49

摘要： Field emission nanostructures assist operation of a microdischarge device. The field emission nanostructures are integrated into the microdischarge device(s) or are situated near an electrode of the microdischarge device(s). The field emission nanostructures reduce operating and ignition voltages compared to otherwise identical devices lacking the field emission nanostructures, while also increasing the radiative output of the microdischarge device(s).

摘要翻译： 场发射纳米结构有助于微放电器件的工作。 场发射纳米结构集成到微放电器件中或位于微放电器件的电极附近。 与其他相同的缺少场发射纳米结构的器件相比，场致发射纳米结构降低了操作和点火电压，同时也增加了微放电器件的辐射输出。