发明授权
- 专利标题: Semiconductor device and method for fabricating the same
- 专利标题(中): 半导体装置及其制造方法
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申请号: US11140843申请日: 2005-05-31
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公开(公告)号: US07115468B2公开(公告)日: 2006-10-03
- 发明人: Hyung-Bok Choi
- 申请人: Hyung-Bok Choi
- 申请人地址: KR Icheon-si
- 专利权人: Hynix Semiconductor Inc.
- 当前专利权人: Hynix Semiconductor Inc.
- 当前专利权人地址: KR Icheon-si
- 代理机构: Marshall, Gerstein & Borun LLP
- 优先权: KR2001-52387 20010829
- 主分类号: H01L21/8242
- IPC分类号: H01L21/8242
摘要:
A semiconductor device and a fabricating method for the same are disclosed, in which when forming a capacitor sacrificial film pattern, even if a misalignment occurs, the degradation of the dielectric property due to a direct contact between the contact plug and the dielectric medium can be prevented. The semiconductor device includes a connecting part connected through an insulating layer of a substrate to a conductive layer, a seed separating layer formed around the connecting part and the insulating layer to provide an open region exposing at least part of the connecting part, a seed layer filled into the open region of the seed separating layer and a capacitor. The capacitor includes of a lower electrode formed upon the seed layer, a dielectric medium formed upon the lower electrode, and an upper electrode formed upon the dielectric medium.
公开/授权文献
- US20050233520A1 Semiconductor device and method for fabricating the same 公开/授权日:2005-10-20
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