- 专利标题: Process for manufacturing a dual charge storage location memory cell
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申请号: US10964049申请日: 2004-10-12
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公开(公告)号: US07115472B2公开(公告)日: 2006-10-03
- 发明人: Paolo Caprara , Claudio Brambilla , Manlio Sergio Cereda
- 申请人: Paolo Caprara , Claudio Brambilla , Manlio Sergio Cereda
- 申请人地址: IT Agrate Brianza
- 专利权人: STMicroelectronics, S.r.l.
- 当前专利权人: STMicroelectronics, S.r.l.
- 当前专利权人地址: IT Agrate Brianza
- 代理机构: Graybeal Jackson Haley LLP
- 代理商 Lisa K. Jorgenson; Bryan A. Santarelli
- 优先权: EP01830634 20011008
- 主分类号: H01L21/8242
- IPC分类号: H01L21/8242
摘要:
A process for manufacturing a dual charge storage location electrically programmable memory cell that includes the steps of forming a central insulated gate over a semiconductor substrate; forming physically separated charge-confining layers stack portions of a dielectric-charge trapping material-dielectric layers stack at the sides of the central gate, the charge trapping material layer in each charge-confining layers stack portion forming a charge storage element; forming side control gates over each of the charge-confining layers stack portions; forming memory cell source/drain regions laterally to the side control gates; and electrically connecting the side control gates to the central gate. Each of the charge-confining layers stack portions at the sides of the central gate is formed with an “L” shape, with a base charge-confining layers stack portion lying on the substrate surface and an upright charge-confining layers stack portion lying against a respective side of the insulated gate.
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