Invention Grant
- Patent Title: Process for manufacturing a dual charge storage location memory cell
-
Application No.: US10964049Application Date: 2004-10-12
-
Publication No.: US07115472B2Publication Date: 2006-10-03
- Inventor: Paolo Caprara , Claudio Brambilla , Manlio Sergio Cereda
- Applicant: Paolo Caprara , Claudio Brambilla , Manlio Sergio Cereda
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics, S.r.l.
- Current Assignee: STMicroelectronics, S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Graybeal Jackson Haley LLP
- Agent Lisa K. Jorgenson; Bryan A. Santarelli
- Priority: EP01830634 20011008
- Main IPC: H01L21/8242
- IPC: H01L21/8242

Abstract:
A process for manufacturing a dual charge storage location electrically programmable memory cell that includes the steps of forming a central insulated gate over a semiconductor substrate; forming physically separated charge-confining layers stack portions of a dielectric-charge trapping material-dielectric layers stack at the sides of the central gate, the charge trapping material layer in each charge-confining layers stack portion forming a charge storage element; forming side control gates over each of the charge-confining layers stack portions; forming memory cell source/drain regions laterally to the side control gates; and electrically connecting the side control gates to the central gate. Each of the charge-confining layers stack portions at the sides of the central gate is formed with an “L” shape, with a base charge-confining layers stack portion lying on the substrate surface and an upright charge-confining layers stack portion lying against a respective side of the insulated gate.
Public/Granted literature
- US20050064654A1 Process for manufacturing a dual charge storage location memory cell Public/Granted day:2005-03-24
Information query
IPC分类: