发明授权
- 专利标题： Determining transmission of error effects for improving parametric performance
- 专利标题（中）： 确定误差效应的传输，以提高参数性能
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申请号： US10323553申请日： 2002-12-18
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公开(公告)号： US07117062B1公开(公告)日： 2006-10-03
- 发明人: Thomas J. Sonderman , Robert J. Chong , Brian K. Cusson , Alexander J. Pasadyn
- 申请人： Thomas J. Sonderman , Robert J. Chong , Brian K. Cusson , Alexander J. Pasadyn
- 申请人地址： US TX Austin
- 专利权人： Advanced Micro Devices, Inc.
- 当前专利权人： Advanced Micro Devices, Inc.
- 当前专利权人地址： US TX Austin
- 代理机构： Williams, Morgan & Amerson, P.C.
- 主分类号： G06F19/00
- IPC分类号： G06F19/00
摘要：
A method and an apparatus for characterizing an uncertainty factor relating to processing workpieces. A first processing step is performed upon a workpiece. A first uncertainty factor associated with the first processing step is calculated. A final uncertainty factor associated with an end-of-line parameter relating to the workpiece is calculated based upon the first uncertainty factor. A process control function based upon the final uncertainty factor is performed.