发明授权
US07126100B1 System and method for sensing using adjustable modulation transfer function (MTF)
有权
使用可调调制传递函数（MTF）进行感测的系统和方法
- 专利标题： System and method for sensing using adjustable modulation transfer function (MTF)
- 专利标题（中）： 使用可调调制传递函数（MTF）进行感测的系统和方法
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申请号： US10850818申请日： 2004-05-21
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公开(公告)号： US07126100B1公开(公告)日： 2006-10-24
- 发明人: Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown , Bin-Ming Benjamin Tsai
- 申请人： Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown , Bin-Ming Benjamin Tsai
- 申请人地址： US CA Milpitas
- 专利权人： KLA-Tencor Technologies Corporation
- 当前专利权人： KLA-Tencor Technologies Corporation
- 当前专利权人地址： US CA Milpitas
- 代理机构： Smyrski Law Group, A.P.C.
- 主分类号： H01L27/00
- IPC分类号： H01L27/00
摘要：
A variable modulated transfer function (MTF) design employing a variable gate voltage source for use in inspecting specimens is disclosed. The design applies a variable gate voltage to each pixel of a sensor, wherein applying the variable gate voltage to each pixel adjusts the MTF of the pixel. MTF adjustment improves adverse effects encountered during inspection, such as aliasing and maintaining contrast.
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