发明授权
US07126696B2 Interferometric miniature grating encoder readhead using fiber optic receiver channels
有权
使用光纤接收器通道的干涉微型光栅编码器读头
- 专利标题: Interferometric miniature grating encoder readhead using fiber optic receiver channels
- 专利标题(中): 使用光纤接收器通道的干涉微型光栅编码器读头
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申请号: US10674619申请日: 2003-09-30
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公开(公告)号: US07126696B2公开(公告)日: 2006-10-24
- 发明人: Joseph D. Tobiason
- 申请人: Joseph D. Tobiason
- 申请人地址: JP Kawasaki
- 专利权人: Mitutoyo Corporation
- 当前专利权人: Mitutoyo Corporation
- 当前专利权人地址: JP Kawasaki
- 代理机构: Christensen O'Connor Johnson Kindness PLLC
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01D5/38
摘要:
An interferometric fiber optic encoder readhead for sensing the displacement of a scale grating is disclosed. The detector channels of the readhead are fiber optic detector channels having respective phase grating masks. The fiber optic encoder readhead is configured to detect the displacement of interference fringes arising from the scale grating. In various exemplary embodiments, the fiber optic readhead is constructed and operably positioned according to various design relationships that insure a compact mounting and a relatively ideal sinusoidal signal as a function of displacement. Accordingly, high levels of displacement signal interpolation may be achieved, allowing sub-micrometer displacement measurements. The fiber optic encoder readhead may be assembled in a particularly accurate and economical manner and may be provided in a package with dimensions on the order of 1–2 millimeters.
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