公开(公告)号：US20130001412A1

公开(公告)日：2013-01-03

申请号：US13175795

申请日：2011-07-01

申请人： Joseph D. Tobiason

发明人： Joseph D. Tobiason

IPC分类号： G01D5/34

CPC分类号： G01D5/34746 ,  G01D5/34715 ,  G01D5/38

摘要： An optical encoder system with a passive readhead is provided. The passive readhead does not have an attached cable and is an all optical readhead where the measurement position information relative to a scale is read remotely by direct line-of-sight optical transmission to a remote companion system. The remote companion system includes a light source and a sensing portion. In one embodiment, the sensing portion may comprise a remote lens portion and a photodetector arrangement. The remote companion system is configured to optically sense intensities of imaged regions from the passive readhead, and to output a plurality of signals indicative of the measurement position based on the sensed intensities.

摘要翻译： 提供具有被动读取头的光学编码器系统。 被动读取头不具有连接的电缆，并且是全光学读取头，其中相对于刻度尺的测量位置信息通过直接视线光学传输远程读取到远程配套系统。 远程配套系统包括光源和感测部分。 在一个实施例中，感测部分可以包括远程镜头部分和光电检测器装置。 远程伴侣系统被配置为光学地感测来自被动读取头的成像区域的强度，并且基于感测到的强度来输出指示测量位置的多个信号。

公开(公告)号：US20080024789A1

公开(公告)日：2008-01-31

申请号：US11461423

申请日：2006-07-31

申请人： Joseph D. Tobiason ,  Eric Herbert Altendorf

发明人： Joseph D. Tobiason ,  Eric Herbert Altendorf

IPC分类号： G01B9/02

CPC分类号： G01D5/38

摘要： An ultra-miniature interferometric fiber-optic encoder readhead for sensing displacement of a very fine pitch scale grating is disclosed. The readhead includes a source grating that diffracts diverging source light into ±1st order beams, a pair of mirrors that reflect the ±1st order beams to converge toward the scale grating. The ±1st order scale light beams are reflectively diffracted back from scale grating to return to the mirrors, and are then reflected to converge back toward the light source and a set of adjacent fiber-optic receiver channels. An interference field generating grating positioned in front of the receiver channels produces interference fringes having a desired pitch. Movement of the interference fringes is sensed by the fiber-optic receiver channels to provide displacement information. The readhead may be configured so that primarily or only ±1st order light reaches the receiver channels.

摘要翻译： 公开了一种用于感测极细节距光栅的位移的超微型干涉光纤编码器读头。 读取头包括将发散源光衍射为±1级光束的源光栅，反射±1级光束以朝向刻度光栅会聚的一对反射镜。 ±1级标度光束从刻度光栅反射衍射回到反射镜，然后被反射回会聚到光源和一组相邻的光纤接收器通道。 位于接收器通道前方的干涉场产生光栅产生具有期望间距的干涉条纹。 干涉条纹的运动由光纤接收器通道感测以提供位移信息。 读取头可以被配置为使得主要或仅仅±1 命令光到达接收器通道。

公开(公告)号：US06905258B2

公开(公告)日：2005-06-14

申请号：US10650453

申请日：2003-08-27

申请人： Joseph D. Tobiason ,  Michael Nahum ,  Kim W. Atherton

发明人： Joseph D. Tobiason ,  Michael Nahum ,  Kim W. Atherton

IPC分类号： G01B11/00 ,  G01D5/347 ,  G02B6/36

CPC分类号： G01D5/34723

摘要： A fiber optic readhead arrangement for imaging a scale onto a set of optical fiber receiver channels is disclosed. The readhead arrangement includes an imaging lens and may include an aperture positioned at a focal point of the imaging lens in a telecentric arrangement. An axicon lens may be utilized to direct source light away from the imaging lens and into a ring-shaped annular source lens which surrounds the imaging lens. A source lens may concentrate source light on the scale in an area where it will be imaged back through the imaging lens to the readhead. In one embodiment, multiple source fibers may be provided around the perimeter of the fiber optic readhead arrangement. In another embodiment, the receiver fibers may also function as source fibers. In various exemplary embodiments, high levels of displacement signal interpolation may be achieved to provide high resolution measurement.

摘要翻译： 公开了一种用于将刻度成像到一组光纤接收器通道上的光纤读头装置。 读取头装置包括成像透镜，并且可以包括以远心布置定位在成像透镜的焦点处的孔。 可以使用旋转透镜来将源光引导离开成像透镜并且将其引导到围绕成像透镜的环形环形源透镜中。 源透镜可以将源光集中在其将通过成像透镜成像回到读取头的区域中的刻度上。 在一个实施例中，可以围绕光纤读头装置的周边设置多个源光纤。 在另一个实施例中，接收器光纤也可用作源光纤。 在各种示例性实施例中，可以实现高水平的位移信号内插以提供高分辨率测量。

公开(公告)号：US20130277540A1

公开(公告)日：2013-10-24

申请号：US13452782

申请日：2012-04-20

申请人： Joseph D. Tobiason

发明人： Joseph D. Tobiason

IPC分类号： G01D5/347

CPC分类号： G01D5/38 ,  G01D5/268

摘要： A readhead and scale arrangement comprises: a readhead comprising a light source configured to output diverging source light comprising a plurality of individually detected wavelengths and at least a first optical signal receiver channel configured to provide a first set of position signals; and a scale track extending along the measuring axis direction on a scale member comprising a scale grating, the scale track configured to diffract the first diverging source light to provide first and second diffracted scale light portions of each of the individually detected wavelengths to the first optical signal receiver channel which provide interference fringes. The readhead comprises an optical path difference element, arranged such that respective wavelengths undergo different phase shifts. Such an encoder is robust to scale track contamination and other signal degradation.

摘要翻译： 读取头和刻度布置包括：读取头，其包括被配置为输出包括多个单独检测的波长的发散源光的光源以及被配置为提供第一组位置信号的至少第一光信号接收器通道; 以及沿着测量轴方向在包括刻度光栅的刻度部件上延伸的刻度轨道，所述刻度轨道被配置为衍射第一发散源光，以将每个单独检测的波长的第一和第二衍射刻度光部分提供给第一光学 信号接收机通道，提供干扰条纹。 读取头包括光路差分元件，其布置成使得各个波长经历不同的相移。 这样的编码器是鲁棒的，以便缩放轨道污染和其他信号劣化。

公开(公告)号：US20110031383A1

公开(公告)日：2011-02-10

申请号：US12535561

申请日：2009-08-04

申请人： Joseph D. Tobiason ,  Toru Yaku ,  Emi Kaneko ,  Eric H. Altendorf

发明人： Joseph D. Tobiason ,  Toru Yaku ,  Emi Kaneko ,  Eric H. Altendorf

IPC分类号： G01D5/34

CPC分类号： G01D5/34

摘要： A method and apparatus for suppressing loss of scale image contrast due to interference effects from optical path length differences, including lens profile aberrations, are provided in a displacement sensing optical encoder that uses a telecentric imaging configuration. According to the invention, the encoder is configured such that the image light that reaches the detector comprises symmetric ray bundles concentrated symmetrically on opposite sides of the optical axis center at the limiting aperture of the telecentric imaging configuration. Central ray bundles, and/or other ray bundles that have an optical path lengths significantly different than the operational symmetric ray bundles are prevented or blocked. As a result destructive interference is prevented and image contrast is improved.

摘要翻译： 在使用远心成像配置的位移感测光学编码器中提供了一种用于抑制由于光程长度差异造成的干涉影响造成的尺度图像对比度损失的方法和装置，包括透镜轮廓像差。 根据本发明，编码器被配置为使得到达检测器的图像光包括在远心成像配置的限制孔径处对称地集中在光轴中心的相对侧上的对称光束。 防止或阻止具有与操作对称光束的显着不同的光路长度的中心线束和/或其他光束束。 因此，防止了破坏性干扰并且改善了图像对比度。

公开(公告)号：US20090109285A1

公开(公告)日：2009-04-30

申请号：US11925642

申请日：2007-10-26

申请人： Joseph D. Tobiason ,  Paul G. Gladnick

发明人： Joseph D. Tobiason ,  Paul G. Gladnick

IPC分类号： H04N7/18

CPC分类号： G02B21/06 ,  G02B21/365 ,  H04N5/2256

摘要： A micro light interface assembly for a microscopic machine vision inspection system includes a micro light assembly. The micro light assembly provides addressable light emitting elements arranged around the periphery of an aperture having an aperture dimension DAPMIN that is smaller than a barrel dimension DBAR of the inspection system objective lens. The aperture may be located along the optical axis and within the working distance of the objective lens such that the light emitting elements are closely arranged around a field of view. The micro light interface assembly may be held and operated through a connection element that may be used for the interchanging the micro light interface assembly with a touch probe, in some embodiments.

摘要翻译： 用于微机器视觉检查系统的微光接口组件包括微型灯组件。 微型灯组件提供可寻址的发光元件，其围绕具有小于检查系统物镜的镜筒尺寸DBAR的孔径尺寸DAPMIN的孔周边布置。 孔可以沿着光轴并且在物镜的工作距离内定位，使得发光元件围绕视场紧密地布置。 在一些实施例中，微光接口组件可以通过连接元件来保持和操作，该连接元件可用于将微光接口组件与探针交换。

公开(公告)号：US07432496B1

公开(公告)日：2008-10-07

申请号：US11829715

申请日：2007-07-27

申请人： Michael Nahum ,  Joseph D. Tobiason

发明人： Michael Nahum ,  Joseph D. Tobiason

IPC分类号： G01B11/00 ,  G06K9/82

CPC分类号： G01D5/34707 ,  G01D18/008

摘要： A method for writing or calibrating the scale of a scale-based position encoder. The scale is installed where it will be used to provide ongoing position measurements for a host system. The image correlation sensor is temporarily mounted proximate to the mounting position of the scale-based position encoder readhead on the host system, and is moved along the measuring axis relative to the scale, to provide corresponding displacement measurement information. The displacement measurement information is used to govern a scale writing process or a calibration process for the scale-based position encoder, such that the displacement measurement information at least partially governs the values of respective ongoing position measurements provided by the scale-based position encoder at respective positions along the measuring axis. A two-axis image correlation displacement sensor is advantageously used to detect and/or corrected various potential errors during the calibration or writing process.

摘要翻译： 一种用于写入或校准基于刻度的位置编码器的刻度的方法。 规模安装在将用于为主机系统提供正在进行的位置测量的位置。 图像相关传感器临时安装在主机系统上靠近基于刻度的位置编码器读取头的安装位置，并且相对于刻度沿着测量轴线移动，以提供对应的位移测量信息。 位移测量信息用于控制基于比例的位置编码器的刻度写入过程或校准过程，使得位移测量信息至少部分地控制由基于比例的位置编码器提供的各个正在进行的位置测量值 沿着测量轴的各个位置。 有利地，双轴图像相关位移传感器用于在校准或写入过程期间检测和/或校正各种潜在误差。

公开(公告)号：US07130320B2

公开(公告)日：2006-10-31

申请号：US10705903

申请日：2003-11-13

申请人： Joseph D. Tobiason ,  David W. Sesko

发明人： Joseph D. Tobiason ,  David W. Sesko

IPC分类号： H01S3/10 ,  H01S3/08

CPC分类号： H01S3/1062 ,  H01S3/08059 ,  H01S5/02248 ,  H01S5/141

摘要： An external cavity laser has a wavelength of the laser output that is tuned by a rotary tuning element mounted on the axle of a motor. The rotary tuning element includes a variable thickness interference film for wavelength selection, and a variable thickness compensation prism to adjust the cavity length appropriately for the selected wavelength, to stable wavelengths and mode-hop-free tuning ranges as the tuning element is rotated.

摘要翻译： 外腔激光器具有由安装在电动机轴上的旋转调谐元件调谐的激光输出的波长。 旋转调谐元件包括用于波长选择的可变厚度干涉膜和可调节厚度补偿棱镜，用于在调谐元件旋转时将所选择的波长适当地调节腔长度，到稳定波长和无跳跃调谐范围。

公开(公告)号：US07608813B1

公开(公告)日：2009-10-27

申请号：US12273400

申请日：2008-11-18

申请人： Michelle M. Milvich ,  Joseph D. Tobiason

发明人： Michelle M. Milvich ,  Joseph D. Tobiason

IPC分类号： G01D5/34

CPC分类号： G01D5/34784

摘要： An encoder configuration comprises an illumination portion, absolute scale pattern comprising absolute tracks, and a detector having a width dimension YDETABS. An absolute track pattern comprises geometrically congruent sub tracks, and the congruent sub tracks are arranged such that if one is translated by the width dimension YDETABS, then they will nominally coincide. The congruent sub tracks may be separated by a dimension YCENT that is less than YDETABS, and may each have a dimension YTOL, such that [YCENT+2(YTOL)] is greater than YDETABS. Thus, the detector may be narrower than the absolute track pattern, but because the detector edges are each nominally located over congruent sub tracks the detected signal is not sensitive to lateral misalignment of the detector within the pattern. These principles provide great freedom in configuring advantageous individual pattern features in the absolute track, even though the detector is narrower than the absolute track.

摘要翻译： 编码器配置包括照明部分，包括绝对轨迹的绝对刻度图案和具有宽度尺寸YDETABS的检测器。 绝对轨道图案包括几何相等的子轨道，并且一致的子轨道被布置成使得如果通过宽度尺寸YDETABS平移，则它们将名义上重合。 一致的子轨道可以由小于YDETABS的维度YCENT分隔，并且可以各自具有维度YTOL，使得[YCENT + 2（YTOL）]大于YDETABS。 因此，检测器可以比绝对轨道图案更窄，但是由于检测器边缘各自名义上位于遍及子轨道上，所检测的信号对于图案内的检测器的横向不对准不敏感。 尽管检测器比绝对轨道窄，但是这些原理提供了在绝对轨迹中配置有利的各个图案特征的极大自由度。

公开(公告)号：US07211782B2

公开(公告)日：2007-05-01

申请号：US10901701

申请日：2004-07-29

申请人： Joseph D. Tobiason ,  Avron Zwilling ,  Casey Emtman ,  Scott Harsila ,  Mike Goldsworthy ,  Kim W. Atherton

发明人： Joseph D. Tobiason ,  Avron Zwilling ,  Casey Emtman ,  Scott Harsila ,  Mike Goldsworthy ,  Kim W. Atherton

IPC分类号： G01J1/04 ,  G02B6/36

CPC分类号： G01D5/35303 ,  G02B6/381

摘要： All-optical output precision measuring gauges that sense the displacement of an internal scale grating are disclosed. Each type of gauge includes a compact, miniature, or ultra-miniature optical readhead that includes a light source for transmitting light to the scale grating, and optical-fiber detector channels for receiving light from the scale grating and outputting optical measuring signals from the gauge. In various embodiments, the optical-fiber detector channels have respective phase grating masks for receiving a periodic light pattern that moves in correspondence to the scale grating, and the channels are arranged in balanced pairs. In various embodiments, the optical readhead is an interferometric-type optical readhead that provides a measuring resolution as fine as 10–50 nanometers or less. In various embodiments, the gauge is provided in an unprecedented miniature size. In various embodiments, the gauge is motorized to provide a precision actuator.

摘要翻译： 公开了感测内部刻度光栅的位移的全光输出精密测量计。 每种类型的量规包括一个紧凑型，微型或超微型光学读取头，其包括用于将光传输到刻度光栅的光源和用于接收来自刻度光栅的光的光纤检测器通道，并从该规格输出光学测量信号 。 在各种实施例中，光纤检测器通道具有各自的相位光栅掩模，用于接收对应于刻度光栅移动的周期性光图案，并且通道以平衡对布置。 在各种实施例中，光学读取头是干涉式光学读取头，其提供的精度为10-50纳米或更小的测量分辨率。 在各种实施例中，以前所未有的微型尺寸提供量规。 在各种实施例中，将该量规机动化以提供精密致动器。