- Patent Title: Measurement of complex surface shapes using a spherical wavefront
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Application No.: US11329304Application Date: 2006-01-10
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Publication No.: US07126698B2Publication Date: 2006-10-24
- Inventor: Peter J De Groot , Xavier Colonna De Lega
- Applicant: Peter J De Groot , Xavier Colonna De Lega
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
Conical surfaces (and other complex surface shapes) can be interferometrically characterized using a locally spherical measurement wavefront (e.g., spherical and aspherical wavefronts). In particular, complex surface shapes are measured relative to a measurement point datum. This is achieved by varying the radius of curvature of a virtual surface corresponding to a theoretical test surface that would reflect a measurement wavefront to produce a constant optical path length difference (e.g., zero OPD) between the measurement and reference wavefronts.
Public/Granted literature
- US20060114475A1 Measurement of complex surface shapes using a spherical wavefront Public/Granted day:2006-06-01
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