发明授权
US07132707B2 Magnetic random access memory array with proximate read and write lines cladded with magnetic material
有权
磁性随机存取存储器阵列,具有用磁性材料包覆的近似读写线
- 专利标题: Magnetic random access memory array with proximate read and write lines cladded with magnetic material
- 专利标题(中): 磁性随机存取存储器阵列,具有用磁性材料包覆的近似读写线
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申请号: US10910725申请日: 2004-08-03
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公开(公告)号: US07132707B2公开(公告)日: 2006-11-07
- 发明人: Tai Min , Yimin Guo , Pokang Wang
- 申请人: Tai Min , Yimin Guo , Pokang Wang
- 申请人地址: US CA Milpitas US CA Milpitas
- 专利权人: Headway Technologies, Inc.,Applied Spintronics, Inc.
- 当前专利权人: Headway Technologies, Inc.,Applied Spintronics, Inc.
- 当前专利权人地址: US CA Milpitas US CA Milpitas
- 代理机构: Saile Ackerman LLC
- 代理商 Stephen B. Ackerman
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L29/82 ; H01L23/552 ; H01L27/20
摘要:
An MTJ MRAM cell is formed above or below an intersection of vertically separated, magnetically clad, ultra-thin orthogonal word and bit lines whose thickness is less than 100 nm. Lines of this thickness produce switching magnetic fields at the cell free layer that are enhanced by a factor of approximately two for a given current. The word and bit lines also include a soft magnetic layer of high permeability formed on their surfaces distal from the cell to improve the magnetic field still further. The fabrication of a cell with such thin lines is actually simplified as a result of the thinner depositions and eliminates the necessity of removing material by CMP during patterning and polishing, thereby producing uniform spacing between the lines and the cell free layer.
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