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US07135124B2 Method for thinning wafers that have contact bumps 失效
稀释具有接触凸点的晶片的方法

Method for thinning wafers that have contact bumps
摘要:
In accordance with the foregoing objects and advantages, the present invention provides a fabrication device that may be used during the grinding operation of the fabrication process. The fabrication device comprises a socket plate that includes a plurality of cavities formed therein that correspond in position and number to the solder (or other conductive material) bumps formed on the front surface of a product wafer.
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