发明授权
- 专利标题: Semiconductor memory device with surface strap and method of fabricating the same
- 专利标题(中): 具有表面带的半导体存储器件及其制造方法
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申请号: US11044896申请日: 2005-01-27
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公开(公告)号: US07135368B2公开(公告)日: 2006-11-14
- 发明人: Masaru Kito , Ryota Katsumata , Hideaki Aochi
- 申请人: Masaru Kito , Ryota Katsumata , Hideaki Aochi
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Frommer Lawrence & Haug LLP
- 优先权: JP2003-166851 20030611
- 主分类号: H01L21/8242
- IPC分类号: H01L21/8242
摘要:
A method of fabricating a semiconductor memory device, comprising recess-etching a major surface of a semiconductor substrate, thereby forming a pillar that becomes a device formation region; burying an insulation film in the recess-etched region, thereby forming a device isolation region; burying a first oxide film at a side wall of the pillar on the device isolation region; forming a second oxide film on an upper part of the pillar; and removing an upper part of the first oxide film using the second oxide film as a mask, thereby exposing an upper surface and an upper part of the side wall of the pillar; and the method, comprising forming a conductive material on the exposed upper surface and the exposed upper part of the side wall of the pillar, thereby forming a surface strap that electrically connects the capacitor and the second activation region.
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