- 专利标题: Phase change memory with damascene memory element
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申请号: US10949090申请日: 2004-09-24
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公开(公告)号: US07135696B2公开(公告)日: 2006-11-14
- 发明人: Ilya V. Karpov , Charles C. Kuo , Yudong Kim , Fabio Pellizzer
- 申请人: Ilya V. Karpov , Charles C. Kuo , Yudong Kim , Fabio Pellizzer
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Trop, Pruner & Hu, P.C.
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A phase change material may be formed within a trench in a first layer to form a damascene memory element and in an overlying layer to form a threshold device. Below the first layer may be a wall heater. The wall heater that heats the overlying phase change material may be formed in a U-shape in some embodiments of the present invention. The phase change material for the memory element may be elongated in one direction to provide greater alignment tolerances with said heater and said threshold device.
公开/授权文献
- US20060073631A1 Phase change memory with damascene memory element 公开/授权日:2006-04-06
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