发明授权
- 专利标题： Alignment of ellipsometer beam to sample surface
- 专利标题（中）： 将椭偏仪光束对准样品表面
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申请号： US10684088申请日： 2003-10-12
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公开(公告)号： US07136162B1公开(公告)日： 2006-11-14
- 发明人: Martin M. Liphardt , Craig M. Herzinger , Brian D. Guenther , Steven E. Green , Galen L. Pfeiffer , Ping He
- 申请人： Martin M. Liphardt , Craig M. Herzinger , Brian D. Guenther , Steven E. Green , Galen L. Pfeiffer , Ping He
- 申请人地址： US NE Lincoln
- 专利权人： J.A. Woollam Co., Inc.
- 当前专利权人： J.A. Woollam Co., Inc.
- 当前专利权人地址： US NE Lincoln
- 代理商 James D. Welch
- 主分类号： G01J4/00
- IPC分类号： G01J4/00
摘要：
Disclosed is a system and method of aligning, preferably by an automated procedure, a beam of electromagnetic radiation provided by a source thereof so that it approaches a sample at a specific location upon its surface, at a known angle, then reflects therefrom and enters a data detector.
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