发明授权
- 专利标题: Relay
- 专利标题(中): 中继
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申请号: US11293299申请日: 2005-12-05
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公开(公告)号: US07137412B2公开(公告)日: 2006-11-21
- 发明人: Tetsuya Watanabe
- 申请人: Tetsuya Watanabe
- 申请人地址: JP Tokyo
- 专利权人: Yokogawa Electric Corporation
- 当前专利权人: Yokogawa Electric Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2005-115788 20050413
- 主分类号: F15C1/04
- IPC分类号: F15C1/04 ; F15B21/00 ; F16K49/00
摘要:
A relay long in service life aiming at higher reliability and lower cost is achieved by use of a technology of microelectromechanical•systems. The relay comprises a flow path having narrow chokes and wide chokes, formed by bonding two insulating members together, a plurality of liquid chambers formed by partitioning the flow path with the narrow chokes and the wide chokes, a plurality of electrodes disposed at the plurality of the liquid chambers, respectively, first and second gas chambers disposed so as to communicate with respective ends of the flow path, a gas sealed in the first and second gas chambers, respectively, heating means for heating the gas, and holes defined in one of the insulating members, communicating with the flow path, respectively, wherein a conductive fluid is introduced into the flow path through respective inlet ports of the holes, and the respective inlet ports are sealed.
公开/授权文献
- US20060231148A1 RELAY 公开/授权日:2006-10-19