Invention Grant
- Patent Title: Micro-structure gap control technology and structure formed therefrom
- Patent Title (中): 微结构间隙控制技术及结构形成
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Application No.: US10864182Application Date: 2004-06-09
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Publication No.: US07139110B2Publication Date: 2006-11-21
- Inventor: Long-Sun Huang , Yang-Lin Chen
- Applicant: Long-Sun Huang , Yang-Lin Chen
- Applicant Address: TW Taipei
- Assignee: Walsin Lihwa Corp.
- Current Assignee: Walsin Lihwa Corp.
- Current Assignee Address: TW Taipei
- Agency: Volpe And Koenig, P.C.
- Priority: TW92115600A 20030609
- Main IPC: G02B26/00
- IPC: G02B26/00

Abstract:
A grating manufactured by a micro-structure gap control technique is provided in this invention. The grating includes a first structural part, a second structural part and a substrate. The first structural part includes a first micro-structure and a concavity, the second structural part includes a second micro-structure and an island structure located within the concavity, wherein a gap exists between the inland structure and the concavity. Further, the substrate is bonded to the first structural part and the second structural part for supporting the first structural part and the second structural part.
Public/Granted literature
- US20050035419A1 Micro-structure gap control technology and structure formed therefrom Public/Granted day:2005-02-17
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